Taiwan Semiconductor Manufacturing Company, Ltd. patent applications published on November 9th, 2023

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Summary of the patent applications from Taiwan Semiconductor Manufacturing Company, Ltd. on November 9th, 2023

Taiwan Semiconductor Manufacturing Company, Ltd. has recently filed several patents related to memory devices and semiconductor structures. These patents cover various aspects such as memory stack formation, semiconductor structure design, memory cell fabrication, and ferroelectric memory devices.

Summary: - The patents describe memory stacks consisting of bottom and top electrode layers, a phase change layer, and a rough portion on the top electrode layer. - A semiconductor structure is disclosed, featuring a storage element layer and a selector with multiple insulating and conductive layers. - A memory device is described, comprising a substrate, a spin-orbit torque layer, and a magnetic tunneling junction (MTJ) with a synthetic free layer, barrier layer, and reference layer. - A method for forming a memory cell involves depositing a memory film, a hard mask film, and performing trimming and etching processes. - A bipolar selector with independently tunable threshold voltages is introduced, along with a memory cell and memory array comprising the selector. - An integrated chip is disclosed, including a magnetic tunnel junction, two unipolar selectors, and their electrical connections. - A ferroelectric random-access memory (FeRAM) cell is presented, featuring a bottom electrode, switching layer, and top electrode with an interface structure to prevent diffusion. - A semiconductor device is described, consisting of a semiconductor substrate, memory gate, and data storage element made of a ferroelectric material. - A semiconductor structure is disclosed, comprising a substrate, stacked structure with insulating layers and gate members, and a core structure with memory layer, channel member, contact member, and liner member. - A method of forming a ferroelectric memory device involves atomic layer deposition (ALD) to create a ferroelectric layer with an orthorhombic phase (O-phase).

Notable Applications:

  • Memory stack formation and semiconductor structure design for improved memory devices.
  • Ferroelectric memory cell fabrication with enhanced endurance and prevention of leakage current.
  • Tunable threshold voltages in bipolar selectors for improved performance in memory cells and arrays.
  • Integration of magnetic tunnel junctions and unipolar selectors in an integrated chip for magnetic memory storage.
  • Atomic layer deposition for the formation of ferroelectric memory devices with enhanced ferroelectric polarization.



Contents

Patent applications for Taiwan Semiconductor Manufacturing Company, Ltd. on November 9th, 2023

OPTICAL DETECTION FOR BIO-ENTITIES (18353603)

Main Inventor

Allen Timothy Chang


THERMAL SENSOR USING INVERSION DIFFUSIVITY RESISTANCE (17735887)

Main Inventor

Jaw-Juinn Horng


CONCENTRATION DETERMINATION METHOD (17736105)

Main Inventor

Tung-Tsun Chen


PROBE CARD SUBSTRATE, SUBSTRATE STRUCTURE AND METHOD OF FABRICATING THE SAME (17738023)

Main Inventor

Wei-Yu Chen


APPARATUS, PROCESSING CIRCUITRY AND METHOD FOR MEASURING DISTANCE FROM DIRECT TIME OF FLIGHT SENSOR ARRAY TO AN OBJECT (17737030)

Main Inventor

Chin Yin


PACKAGE, OPTICAL DEVICE, AND MANUFACTURING METHOD OF PACKAGE (18354662)

Main Inventor

Hsien-Wei Chen


SUBSTRATE STAGE AND SUBSTRATE PROCESSING SYSTEM USING THE SAME (18351571)

Main Inventor

Yu-Huan CHEN


METHOD, SYSTEM AND NON-TRANSITORY COMPUTER-READABLE MEDIUM FOR REDUCING WORK-IN-PROCESS (18337021)

Main Inventor

Po-Yi Wang


INTEGRATED CIRCUIT DESIGN METHOD AND SYSTEM (18347928)

Main Inventor

Tien-Chien HUANG


CIRCUIT ARRANGEMENTS HAVING REDUCED DEPENDENCY ON LAYOUT ENVIRONMENT (18347947)

Main Inventor

Huaixin XIAN


LEAKAGE REDUCTION BETWEEN TWO TRANSISTOR DEVICES ON A SAME CONTINUOUS FIN (18355501)

Main Inventor

Chun-Yen Lin


INTEGRATED CIRCUIT, SYSTEM FOR AND METHOD OF FORMING AN INTEGRATED CIRCUIT (18354423)

Main Inventor

Jung-Chan YANG


INTEGRATED CIRCUIT DESIGN USING FUZZY MACHINE LEARNING (18225020)

Main Inventor

Chao Tong


NEW WAS CELL FOR SRAM HIGH-R ISSUE IN ADVANCED TECHNOLOGY NODE (18354824)

Main Inventor

Yangsyu Lin


CONTROL CIRCUIT, MEMORY SYSTEM AND CONTROL METHOD (18354631)

Main Inventor

Win-San Khwa


PROBE CARD DEVICE AND CIRCUIT PROTECTION ASSEMBLY THEREOF (17809901)

Main Inventor

Chih-Chieh LIAO


REFLECTION MODE PHOTOMASK (18356366)

Main Inventor

Chun-Lang CHEN


SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME (17736186)

Main Inventor

Meng-Hsiu HSIEH


WAFER THINNING METHOD HAVING FEEDBACK CONTROL (18356388)

Main Inventor

Yuan-Hsuan CHEN


WAFER CLEANING METHOD (18351566)

Main Inventor

Kuo-Shu TSENG


SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION (17661838)

Main Inventor

Hsuan-Ying PENG


METHOD FOR FORMING SEMICONDUCTOR STRUCTURE (17738182)

Main Inventor

Chih-Hsin YANG


SEMICONDUCTOR PACKAGE AND MANUFACTURING METHOD THEREOF (18356212)

Main Inventor

Sheng-Chieh Yang


ISOLATION WITH MULTI-STEP STRUCTURE (18343947)

Main Inventor

Ta-Chun LIN


Middle-Of-Line Interconnect Structure Having Air Gap And Method Of Fabrication Thereof (18356911)

Main Inventor

Yi-Nien Su


METHOD OF FABRICATING CONTACT STRUCTURE (17738009)

Main Inventor

Chang-Ting Chung


SYSTEM AND METHOD FOR HIGH SPEED INSPECTION OF SEMICONDUCTOR SUBSTRATES (18223498)

Main Inventor

Sheng He HUANG


METHOD FOR NON-DESTRUCTIVE INSPECTION OF CELL ETCH REDEPOSITION (18352382)

Main Inventor

I-Che Lee


PACKAGE AND MANUFACTURING METHOD THEREOF (18355379)

Main Inventor

Yung-Chi Chu


SEMICONDUCTOR STRUCTURE HAVING AN ANTI-ARCING PATTERN DISPOSED ON A PASSIVATION LAYER (18352271)

Main Inventor

Sheng-An Kuo


DIE STACKING STRUCTURE, SEMICONDUCTOR PACKAGE AND MANUFACTURING METHOD OF THE DIE STACKING STRUCTURE (17738032)

Main Inventor

Su-Chun Yang


METHOD OF FABRICATING PACKAGE STRUCTURE (18356227)

Main Inventor

Chih-Hao Chen


OVERSIZED VIA AS THROUGH-SUBSTRATE-VIA (TSV) STOP LAYER (18355463)

Main Inventor

Min-Feng Kao


SEMICONDUCTOR PACKAGE AND METHODS OF MANUFACTURING (17662366)

Main Inventor

Hsien-Wei CHEN


VIA LANDING ON FIRST AND SECOND BARRIER LAYERS TO REDUCE CLEANING TIME OF CONDUCTIVE STRUCTURE (18353997)

Main Inventor

Te-Hsien Hsieh


PACKAGE HAVING DIFFERENT METAL DENSITIES IN DIFFERENT REGIONS AND MANUFACTURING METHOD THEREOF (18356224)

Main Inventor

Hsien-Wei Chen


SEMICONDUCTOR DEVICE INCLUDING BACK SIDE POWER SUPPLY CIRCUIT (18221787)

Main Inventor

Gerben DOORNBOS


INTERCONNECTION STRUCTURE AND METHODS OF FORMING THE SAME (18224209)

Main Inventor

Wei-Hao Liao


RUTHENIUM OXIDE FILM AND RUTHENIUM LINER FOR LOW-RESISTANCE COPPER INTERCONNECTS IN A DEVICE (18352299)

Main Inventor

Shu-Cheng CHIN


INTEGRATED CHIP HAVING A BURIED POWER RAIL (18347775)

Main Inventor

Marcus Johannes Henricus Van Dal


SEMICONDUCTOR PACKAGE AND METHODS OF MANUFACTURING (17661858)

Main Inventor

Hsien-Wei CHEN


SEMICONDUCTOR PACKAGE AND METHOD OF FABRICATING SEMICONDUCTOR PACKAGE (17737998)

Main Inventor

Wei-Ming Wang


PACKAGE STRUCTURE AND MANUFACTURING METHOD THEREOF (18354633)

Main Inventor

Tsung-Fu Tsai


SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME (17738016)

Main Inventor

Wei-Huan Fu


METHOD FOR FABRICATING SEMICONDUCTOR PACKAGE (18354668)

Main Inventor

Chia-Kuei Hsu


SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF (18352270)

Main Inventor

Min-Feng Kao


SEMICONDUCTOR PACKAGE AND METHOD OF MANUFACTURING THE SAME (18354614)

Main Inventor

Shih-Wei Chen


SEMICONDUCTOR PACKAGES AND METHODS FOR FORMING THE SAME (18224065)

Main Inventor

Shin-Yi YANG


IN-MEMORY COMPUTING CIRCUIT AND FABRICATION METHOD THEREOF (17736971)

Main Inventor

Hidehiro Fujiwara


HYBRID BOND PAD STRUCTURE (18355524)

Main Inventor

Sin-Yao Huang


STACKING STRUCTURE, PACKAGE STRUCTURE AND METHOD OF FABRICATING THE SAME (18357137)

Main Inventor

Ming-Fa Chen


INTEGRATED CIRCUIT DEVICE AND METHOD (18355273)

Main Inventor

Wei-Ren CHEN


SEMICONDUCTOR STRUCTURE AND METHODS OF FORMING THE SAME (18225114)

Main Inventor

Ta-Chun LIN


SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF (18224000)

Main Inventor

Wei-Yuan LU


SEMICONDUCTOR DEVICE AND A METHOD FOR FABRICATING THE SAME (18224487)

Main Inventor

Shun-Jang LIAO


SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF (18348531)

Main Inventor

Kuo-Pi TSENG


IMAGE SENSOR WITH SHALLOW TRENCH EDGE DOPING (18342877)

Main Inventor

Yueh-Chuan Lee


IMAGE SENSOR AND METHOD OF FORMING THE SAME (17738031)

Main Inventor

Chun-Liang Lu


IMAGE SENSOR WITH OVERLAP OF BACKSIDE TRENCH ISOLATION STRUCTURE AND VERTICAL TRANSFER GATE (18355481)

Main Inventor

Feng-Chi Hung


BAND-PASS FILTER FOR STACKED SENSOR (18353266)

Main Inventor

Cheng Yu Huang


CAPPING STRUCTURE TO REDUCE DARK CURRENT IN IMAGE SENSORS (18356694)

Main Inventor

Po-Chun Liu


BACKSIDE DEEP TRENCH ISOLATION (BDTI) STRUCTURE FOR CMOS IMAGE SENSOR (17882869)

Main Inventor

Hsin-Hung Chen


SEMICONDUCTOR DEVICE STRUCTURE WITH MAGNETIC ELEMENT (18353307)

Main Inventor

Chi-Cheng CHEN


INTEGRATED CHIP INDUCTOR STRUCTURE (18354842)

Main Inventor

Hung-Wen Hsu


METAL-INSULATOR-METAL CAPACITOR AND METHODS OF MANUFACTURING (17662571)

Main Inventor

Min-Ying TSAI


GATE AIR SPACER PROTECTION DURING SOURCE/DRAIN VIA HOLE ETCHING (18355796)

Main Inventor

Kuo-Chiang Tsai


SOURCE/DRAIN LEAKAGE PREVENTION (17848701)

Main Inventor

Che-Lun Chang


MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE (18352249)

Main Inventor

Yi-Tse Hung


SEMICONDUCTOR DEVICE STRUCTURE AND METHODS OF FORMING THE SAME (17739149)

Main Inventor

Chih-Teng LIAO


ETCH PROFILE CONTROL OF VIA OPENING (18352640)

Main Inventor

Te-Chih HSIUNG


THICKER CORNER OF A GATE DIELECTRIC STRUCTURE AROUND A RECESSED GATE ELECTRODE FOR AN MV DEVICE (18355549)

Main Inventor

Yi-Huan Chen


SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME (18357163)

Main Inventor

Bo-Feng Young


SEMICONDUCTOR DEVICE AND METHODS OF FORMATION (17662185)

Main Inventor

Hsu Ming HSIAO


REPLACEMENT SIDEWALL SPACERS (17662126)

Main Inventor

Chang-Ta Chen


SEMICONDUCTOR DEVICE HAVING NANOSTRUCTURE TRANSISTOR AND METHODS OF FABRICATION THEREOF (17739078)

Main Inventor

Wen-Kai LIN


BIPOLAR JUNCTION TRANSISTORS AND METHODS OF FORMING THE SAME (17737003)

Main Inventor

Chun-Tsung KUO


CAP STRUCTURE COUPLED TO SOURCE TO REDUCE SATURATION CURRENT IN HEMT DEVICE (18348421)

Main Inventor

Ming-Cheng Lin


TRANSISTOR STRUCTURE HAVING IMPROVED ELECTRODE CONDUCTANCE AND METHOD FOR MANUFACTURING THE SAME (17737504)

Main Inventor

Ming-Yen CHUANG


SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME (18352230)

Main Inventor

Chao-Ching Cheng


DOUBLE-SIDED STACKED DTC STRUCTURE (18353246)

Main Inventor

Ming Chyi Liu


CALIBRATION SYSTEM OF CANCELING EFFECT OF PHASE NOISE AND ANALOG-TO-DIGITAL CONVERTING DEVICE COMPRISING THE SAME (18052204)

Main Inventor

Ting-Hao WANG


PHOTOSENSING PIXEL INCLUDING SELF-ALIGNED LIGHT SHIELDING LAYER (17739387)

Main Inventor

Yueh-Chuan LEE


APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION (18224005)

Main Inventor

Wei-Chih LAI


SEMICONDUCTOR PACKAGE ASSEMBLY AND METHOD OF MANUFACTURING THE SAME (18352267)

Main Inventor

Jian-Ting Chen


VARYING THE PO SPACE IN SEMICONDUCTOR LAYOUTS (17661795)

Main Inventor

Feng-Ming Chang


METHOD AND STRUCTURE FOR REDUCE OTP CELL AREA AND LEAKAGE (18353351)

Main Inventor

Meng-Sheng Chang


ETCH METHOD FOR OPENING A SOURCE LINE IN FLASH MEMORY (18353308)

Main Inventor

Yong-Sheng Huang


STRAP-CELL ARCHITECTURE FOR EMBEDDED MEMORY (18354881)

Main Inventor

Wen-Tuo Huang


MEMORY DEVICE AND METHOD FOR FORMING THE SAME (17739871)

Main Inventor

Kuan-Ting CHEN


3D FERROELECTRIC MEMORY (18353954)

Main Inventor

Sheng-Chih Lai


MEMORY DEVICE AND MANUFACTURING METHOD THEREOF (18354667)

Main Inventor

Meng-Han Lin


METHOD OF FORMING FERROELECTRIC MEMORY DEVICE (17740331)

Main Inventor

Rainer Yen-Chieh Huang


SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THEREOF (18353972)

Main Inventor

Yu-Wei Jiang


INTEGRATED CIRCUIT AND METHOD FOR MANUFACTURING THE SAME (18354768)

Main Inventor

Tzu-Yu CHEN


BOTTOM-ELECTRODE INTERFACE STRUCTURE FOR MEMORY (18353988)

Main Inventor

Tzu-Yu Lin


MEMORY CELL WITH UNIPOLAR SELECTORS (18353290)

Main Inventor

Katherine H. Chiang


BIPOLAR SELECTOR WITH INDEPENDENTLY TUNABLE THRESHOLD VOLTAGES (18356585)

Main Inventor

Sheng-Chih Lai


METHOD FOR FORMING A HARD MASK WITH A TAPERED PROFILE (18353254)

Main Inventor

Min-Yung Ko


MEMORY DEVICE (18355385)

Main Inventor

Yen-Lin Huang


SEMICONDUCTOR STRUCTURE AND METHOD OF FORMING THE SAME (18356168)

Main Inventor

Georgios Vellianitis


MEMORY STACKS AND METHODS OF FORMING THE SAME (18356180)

Main Inventor

Tung-Ying Lee