US Patent Application 18351571. SUBSTRATE STAGE AND SUBSTRATE PROCESSING SYSTEM USING THE SAME simplified abstract

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SUBSTRATE STAGE AND SUBSTRATE PROCESSING SYSTEM USING THE SAME

Organization Name

Taiwan Semiconductor Manufacturing Company, Ltd.


Inventor(s)

Yu-Huan Chen of Hsinchu City (TW)

Yu-Chih Huang of Hsinchu City (TW)

Ya-An Peng of Taoyuan City (TW)

Shang-Chieh Chien of New Taipei City (TW)

Li-Jui Chen of Hsinchu City (TW)

Heng-Hsin Liu of New Taipei City (TW)

SUBSTRATE STAGE AND SUBSTRATE PROCESSING SYSTEM USING THE SAME - A simplified explanation of the abstract

This abstract first appeared for US patent application 18351571 titled 'SUBSTRATE STAGE AND SUBSTRATE PROCESSING SYSTEM USING THE SAME

Simplified Explanation

The patent application describes a semiconductor substrate stage used for carrying a substrate.

  • The stage includes a base layer, a magnetic shielding layer, a carrier layer, a receiver, a storage layer, and a magnetic shielding element.
  • The magnetic shielding layer is placed on top of the base layer.
  • The carrier layer is placed on top of the magnetic shielding layer.
  • The receiver is placed on top of the carrier layer.
  • The storage layer is located between the base layer and the magnetic shielding layer.
  • The magnetic shielding element surrounds the receiver on the carrier layer.
  • The purpose of the magnetic shielding layer and element is to protect the receiver from external magnetic interference.
  • The stage is designed to provide a stable and secure platform for carrying a semiconductor substrate.


Original Abstract Submitted

A semiconductor substrate stage for carrying a substrate is provided. The semiconductor substrate stage includes a base layer, a magnetic shielding layer disposed on the base layer, a carrier layer disposed on the magnetic shielding layer, a receiver disposed on the carrier layer, a storage layer disposed between the base layer and the magnetic shielding layer, and a magnetic shielding element disposed on the carrier layer and surrounding the receiver.

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