US Patent Application 18353972. SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THEREOF simplified abstract

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SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THEREOF

Organization Name

Taiwan Semiconductor Manufacturing Company, Ltd.


Inventor(s)

Yu-Wei Jiang of Hsinchu (TW)

Sheng-Chih Lai of Hsinchu County (TW)

Feng-Cheng Yang of Zhudong Township (TW)

Chung-Te Lin of Tainan City (TW)

SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THEREOF - A simplified explanation of the abstract

This abstract first appeared for US patent application 18353972 titled 'SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THEREOF

Simplified Explanation

The abstract describes a semiconductor structure and a method for fabricating it.

  • The semiconductor structure includes a substrate and a stacked structure on the substrate.
  • The stacked structure consists of insulating layers and gate members stacked alternately.
  • A core structure is present within the stacked structure.
  • The core structure comprises a memory layer, a channel member, a contact member, and a liner member.
  • The channel member is located on top of the memory layer.
  • The contact member is positioned on top of the channel member.
  • The liner member surrounds a portion of the core structure.


Original Abstract Submitted

The present disclosure provides a semiconductor structure. The semiconductor structure includes a substrate and a stacked structure disposed on the substrate. The stacked structure includes multiple alternately stacked insulating layers and gate members. A core structure is disposed in the stacked structure. The core structure includes a memory layer, a channel member, a contact member, and a liner member. The channel member is disposed on the memory layer. The contact member is disposed on the channel member. The liner member surrounds a portion of the core structure. The present disclosure also provides a method for fabricating the semiconductor structure.