US Patent Application 18351566. WAFER CLEANING METHOD simplified abstract
Contents
WAFER CLEANING METHOD
Organization Name
Taiwan Semiconductor Manufacturing Company, Ltd.
Inventor(s)
Kuo-Shu Tseng of New Taipei City (TW)
Yao-Yuan Shang of Taichung City (TW)
You-Feng Chen of Taichung City (TW)
WAFER CLEANING METHOD - A simplified explanation of the abstract
This abstract first appeared for US patent application 18351566 titled 'WAFER CLEANING METHOD
Simplified Explanation
- The patent application describes a method for cleaning contaminants on a wafer, specifically focusing on the backside of the wafer. - The backside of the wafer is divided into a clear area and an unclear area, with the contaminants located in the unclear area. - The method involves inspecting the backside of the wafer using an inspection device and generating an inspection signal. - A control signal is then generated based on the inspection signal by a process module. - The control signal includes movement information of a brush element, which is determined based on the coordinates of the contaminants obtained from the inspection signal. - A control device is used to control the brush element and guide it along a predetermined path to clean the contaminants on the backside of the wafer.
Original Abstract Submitted
A wafer cleaning method for cleaning contaminants on a wafer is provided, wherein the backside of the wafer has a clear area and an unclear area, and the contaminants are located in the unclear area. The wafer cleaning method includes inspecting the backside of the wafer and generating an inspection signal by an inspection device. The wafer cleaning method includes generating a control signal according to the inspection signal by a process module, wherein the control signal includes movement information of a brush element according to coordinates of the contaminants obtained from the inspection signal. The wafer cleaning method includes controlling the brush element to clean the contaminants on the backside of the wafer according to the control signal by a control device along a predetermined path.
