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Category:H01L21/687
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Pages in category "H01L21/687"
The following 75 pages are in this category, out of 75 total.
1
- 17678233. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Samsung Electronics Co., Ltd.)
- 17722838. WAFER PROCESSING APPARATUS INCLUDING EFEM AND METHOD OF PROCESSING WAFER simplified abstract (Samsung Electronics Co., Ltd.)
- 17839235. TAB ARRANGEMENT FOR RETAINING SUPPORT ELEMENTS OF SUBSTRATE SUPPORT simplified abstract (Applied Materials, Inc.)
- 17876381. VACUUM CHUCK simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
- 17889035. WAFER BAKING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.)
- 17946947. BACKSIDE DEPOSITION FOR WAFER BOW MANAGEMENT simplified abstract (Applied Materials, Inc.)
- 17954960. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- 17974871. PLANARIZATION APPARATUS AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)
- 18081102. WAFER TYPE SENSOR, WAFER ALIGNMENT METHOD USING THE SAME, AND CALIBRATION DEVICE FOR CALIBRATING WAFER TYPE SENSOR simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- 18081281. ELECTROSTATIC CHUCK INCLUDING UPPER PLATE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)
- 18081948. SUBSTRATE DRYING DEVICE AND METHOD OF DRYING SUBSTRATE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)
- 18098330. WAFER CLEANING APPARATUS, METHOD FOR CLEANING WAFER AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- 18117259. WAFER TRANSFER APPARATUS CAPABLE OF AUTOMATIC TEACHING AND SEMICONDUCTOR PROCESSING SYSTEM INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)
- 18136070. EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)
- 18139840. ATOMIC LAYER ETCHING (ALE) APPARATUS AND ALE METHOD BASED ON THE APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- 18171992. SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD simplified abstract (Kioxia Corporation)
- 18211887. FOCUS RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SEMICONDUCTOR FABRICATION METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)
- 18217815. APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- 18242388. WAFER PROCESSING APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- 18314983. SUBSTRATE PROCESSING APPARATUS AND METHOD simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- 18321164. APPARATUS FOR HEATING WAFER simplified abstract (Samsung Electronics Co., Ltd.)
- 18333572. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE simplified abstract (Kioxia Corporation)
- 18357725. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)
- 18376512. SUBSTRATE TRANSFER UNIT AND SUBSTRATE TRANSFER CONTROL METHOD simplified abstract (Tokyo Electron Limited)
- 18376862. SEMICONDUCTOR MANUFACTURING APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- 18377500. WAFER PROCESSING SYSTEM simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- 18469619. SUBSTRATE TREATMENT APPARATUS AND METHOD FOR TREATING SUBSTRATE simplified abstract (Kioxia Corporation)
- 18470160. SUBSTRATE TREATING APPARATUS simplified abstract (SCREEN Holdings Co., Ltd.)
- 18484562. APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)
- 18504007. WAFER CHUCK, METHOD FOR PRODUCING THE SAME, AND EXPOSURE APPARATUS simplified abstract (CANON KABUSHIKI KAISHA)
- 18514859. SPACE FILLING DEVICE FOR WET BENCH simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)
- 18515616. INTERFACE TOOL simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)
- 18516703. SEMICONDUCTOR PROCESSING APPARATUS AND METHOD UTILIZING ELECTROSTATIC DISCHARGE (ESD) PREVENTION LAYER simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)
- 18517194. SEMICONDUCTOR WAFER CLEANING APPARATUS simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)
- 18519519. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED)
- 18521446. SUBSTRATE FLIPPING IN VACUUM FOR DUAL SIDED PVD SPUTTERING simplified abstract (Applied Materials, Inc.)
- 18523394. SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION simplified abstract (Applied Materials, Inc.)
- 18526350. SUBSTRATE PROCESSING APPARATUS simplified abstract (TOKYO ELECTRON LIMITED)
- 18539507. THERMAL PROCESSING SUSCEPTOR simplified abstract (Applied Materials, Inc.)
- 18545644. SUBSTRATE TRANSFERRING UNIT, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
B
K
- Kioxia corporation (20240096607). SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD simplified abstract
- Kioxia corporation (20240096652). SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE simplified abstract
- Kioxia Corporation patent applications on March 21st, 2024
S
- Samsung electronics co., ltd. (20240093368). EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract
- Samsung electronics co., ltd. (20240096637). SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract
- Samsung electronics co., ltd. (20240120194). WAFER PROCESSING SYSTEM simplified abstract
- Samsung electronics co., ltd. (20240120232). SUBSTRATE TRANSFERRING UNIT, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD simplified abstract
- Samsung electronics co., ltd. (20240120234). SEMICONDUCTOR MANUFACTURING APPARATUS simplified abstract
- Samsung electronics co., ltd. (20240128109). APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract
- Samsung electronics co., ltd. (20240136216). WAFER PROCESSING APPARATUS simplified abstract
- SAMSUNG ELECTRONICS CO., LTD. patent applications on April 11th, 2024
- Samsung Electronics Co., Ltd. patent applications on April 18th, 2024
- SAMSUNG ELECTRONICS CO., LTD. patent applications on April 25th, 2024
- Samsung Electronics Co., Ltd. patent applications on February 29th, 2024
- Samsung Electronics Co., Ltd. patent applications on January 18th, 2024
- SAMSUNG ELECTRONICS CO., LTD. patent applications on January 25th, 2024
- Samsung Electronics Co., Ltd. patent applications on March 21st, 2024
T
U
- US Patent Application 17733657. AIR CURTAIN DEVICE AND WORKPIECE PROCESSING TOOL simplified abstract
- US Patent Application 17824926. WET PROCESSING SYSTEM AND SYSTEM AND METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE simplified abstract
- US Patent Application 17871455. PROCESS KITS AND RELATED METHODS FOR PROCESSING CHAMBERS TO FACILITATE DEPOSITION PROCESS ADJUSTABILITY simplified abstract
- US Patent Application 18233751. METHODS AND APPARATUS FOR MINIMIZING SUBSTRATE BACKSIDE DAMAGE simplified abstract
- US Patent Application 18347971. SYSTEM FOR TRANSFERRING SUBSTRATE AND METHOD FOR TRANSFERRING SUBSTRATE USING THE SAME simplified abstract
- US Patent Application 18349476. Post-CMP Cleaning and Apparatus simplified abstract
- US Patent Application 18362287. SEMICONDUCTOR WAFER STORAGE DEVICE simplified abstract
- US Patent Application 18446392. STRUCTURES AND METHODS FOR PROCESSING A SEMICONDUCTOR SUBSTRATE simplified abstract
- US Patent Application 18447519. SEMICONDUCTOR PROCESSING METHOD AND APPARATUS simplified abstract