20240038504. REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES simplified abstract (Lam Research Corporation)

REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES

Organization Name

Lam Research Corporation

Inventor(s)

Alejandro Sanchez of Mountain View CA (US)

Grayson Ford of San Jose CA (US)

Darrell Ehrlich of San Jose CA (US)

Aravind Alwan of Milpitas CA (US)

Kevin Leung of Dublin CA (US)

Anthony Contreras of Stockton CA (US)

Zhumin Han of Fremont CA (US)

Raphael Casaes of Alameda CA (US)

Joanna Wu of Fremont CA (US)

REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES - A simplified explanation of the abstract

This abstract first appeared for US patent application 20240038504 titled 'REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES

Simplified Explanation

The abstract describes a patent application for a first edge ring designed to support a substrate. The edge ring consists of an annular-shaped body and one or more lift pin receiving elements. The body surrounds the upper portion of the substrate support and has an upper surface, lower surface, radially inner surface, and radially outer surface. The lift pin receiving elements are located on the lower surface of the body and are designed to receive and provide kinematic coupling with the top ends of three or more lift pins.

• The patent application is for a first edge ring used to support a substrate.
• The edge ring has an annular-shaped body that surrounds the upper portion of the substrate support.
• The annular-shaped body has an upper surface, lower surface, radially inner surface, and radially outer surface.
• The lower surface of the annular-shaped body includes one or more lift pin receiving elements.
• The lift pin receiving elements are sized and shaped to receive and provide kinematic coupling with the top ends of three or more lift pins.

Potential Applications:

• Semiconductor manufacturing: The first edge ring can be used in the production of semiconductor devices to support the substrate during various manufacturing processes.
• Flat panel display manufacturing: The edge ring can be utilized in the production of flat panel displays to provide support for the substrate during fabrication.

Problems Solved:

• Improved substrate support: The first edge ring provides enhanced support for the substrate, ensuring stability and preventing damage during manufacturing processes.
• Kinematic coupling: The lift pin receiving elements allow for secure and precise coupling with the lift pins, ensuring accurate positioning of the substrate.

Benefits:

• Enhanced manufacturing efficiency: The use of the first edge ring improves the stability of the substrate, reducing the risk of errors and improving overall manufacturing efficiency.
• Increased substrate protection: The edge ring's design helps protect the substrate from damage, ensuring high-quality production and reducing material waste.

Original Abstract Submitted

a first edge ring for a substrate support is provided. the first edge ring includes an annular-shaped body and one or more lift pin receiving elements. the annular-shaped body is sized and shaped to surround an upper portion of the substrate support. the annular-shaped body defines an upper surface, a lower surface, a radially inner surface, and a radially outer surface. the one or more lift pin receiving elements are disposed along the lower surface of the annular-shaped body and sized and shaped to receive and provide kinematic coupling with top ends respectively of three or more lift pins.