US Patent Application 18362287. SEMICONDUCTOR WAFER STORAGE DEVICE simplified abstract
Contents
SEMICONDUCTOR WAFER STORAGE DEVICE
Organization Name
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Inventor(s)
Yu Ju- Chen of Taoyuan City (TW)
SEMICONDUCTOR WAFER STORAGE DEVICE - A simplified explanation of the abstract
This abstract first appeared for US patent application 18362287 titled 'SEMICONDUCTOR WAFER STORAGE DEVICE
Simplified Explanation
- The patent application describes a method for storing substrates using a storage device. - The method involves placing multiple substrates into slots formed by fin structures on a panel of the storage device. - Each substrate is then bound to a corresponding fin structure. - The storage device can be moved from one location to another. - Finally, the substrates are unbound from the fin structures.
Original Abstract Submitted
The present disclosure describes a method for substrate storage. The method can include respectively placing a plurality of substrates into a plurality of slots formed by a plurality of fin structures on a panel of a storage device. The method can further include binding each of the plurality of substrates to an corresponding one of the plurality of fin structures. The method can further include moving the storage device from a first location to a second location. The method can further include un-binding the plurality of substrates from the plurality of fin structures.
