US Patent Application 17871455. PROCESS KITS AND RELATED METHODS FOR PROCESSING CHAMBERS TO FACILITATE DEPOSITION PROCESS ADJUSTABILITY simplified abstract
PROCESS KITS AND RELATED METHODS FOR PROCESSING CHAMBERS TO FACILITATE DEPOSITION PROCESS ADJUSTABILITY
Organization Name
Inventor(s)
Zhepeng Cong of San Jose CA (US)
Ala Moradian of Sunnyvale CA (US)
Tao Sheng of Santa Clara CA (US)
Nimrod Smith of Cupertino CA (US)
Ashur J. Atanos of San Jose CA (US)
Vinh N. Tran of San Jose CA (US)
PROCESS KITS AND RELATED METHODS FOR PROCESSING CHAMBERS TO FACILITATE DEPOSITION PROCESS ADJUSTABILITY - A simplified explanation of the abstract
This abstract first appeared for US patent application 17871455 titled 'PROCESS KITS AND RELATED METHODS FOR PROCESSING CHAMBERS TO FACILITATE DEPOSITION PROCESS ADJUSTABILITY
Simplified Explanation
- The patent application is about flow guides, process kits, and methods for processing chambers in order to make deposition processes more adjustable. - The flow guide described in the application consists of a middle plate with two arcuate sides, a first flange extending outwardly from one side of the middle plate, and a second flange extending outwardly from the opposite side of the middle plate. - The first and second flanges create a rectangular flow opening between them. - The flow guide is designed to facilitate the adjustment of deposition processes in processing chambers.
Original Abstract Submitted
The present disclosure relates to flow guides, process kits, and related methods for processing chambers to facilitate deposition process adjustability. In one implementation, a flow guide includes a middle plate having a first side and a second side opposing the first side along a first direction. The first side and the second side are arcuate. The flow guide includes a first flange extending outwardly relative to a third side of the middle plate and outwardly relative to an outer face of the middle plate, and a second flange extending outwardly relative to a fourth side of the middle plate and outwardly relative to the outer face of the middle plate. The fourth side opposes the third side along a second direction that intersects the first direction. The flow guide includes a rectangular flow opening defined between the first flange and the second flange.
