17722838. WAFER PROCESSING APPARATUS INCLUDING EFEM AND METHOD OF PROCESSING WAFER simplified abstract (Samsung Electronics Co., Ltd.)
WAFER PROCESSING APPARATUS INCLUDING EFEM AND METHOD OF PROCESSING WAFER
Organization Name
Inventor(s)
Myungki Song of Hwaseong-si (KR)
WAFER PROCESSING APPARATUS INCLUDING EFEM AND METHOD OF PROCESSING WAFER - A simplified explanation of the abstract
This abstract first appeared for US patent application 17722838 titled 'WAFER PROCESSING APPARATUS INCLUDING EFEM AND METHOD OF PROCESSING WAFER
Simplified Explanation
The abstract describes a wafer processing apparatus that includes multiple equipment front end modules (EFEMs), a wafer transfer chamber, a wafer processing chamber, and a wafer transfer arm. Each EFEM consists of an EFEM chamber, several load ports located on the side of the chamber, and a load lock that overlaps with at least one load port vertically.
- The wafer processing apparatus is designed to handle wafer processing in a semiconductor manufacturing environment.
- It includes multiple EFEMs, which are modules that facilitate the transfer of wafers between different chambers.
- Each EFEM has an EFEM chamber, load ports, and a load lock.
- The load ports are positioned on the side of the EFEM chamber, allowing for easy loading and unloading of wafers.
- The load lock overlaps with at least one load port vertically, ensuring a secure seal during the transfer process.
- The wafer transfer chamber and wafer processing chamber are also part of the apparatus, enabling the movement and processing of wafers.
- The wafer transfer arm is responsible for transferring wafers between the EFEMs, transfer chamber, and processing chamber.
Potential Applications
- Semiconductor manufacturing: The wafer processing apparatus can be used in semiconductor fabrication facilities to handle the processing of wafers.
Problems Solved
- Efficient wafer transfer: The apparatus solves the problem of efficiently transferring wafers between different chambers in a semiconductor manufacturing environment.
- Secure sealing: The load lock overlapping with the load ports ensures a secure seal during the transfer process, preventing contamination or damage to the wafers.
Benefits
- Improved productivity: The apparatus allows for efficient and seamless transfer of wafers, reducing downtime and increasing overall productivity.
- Enhanced wafer protection: The secure sealing provided by the load lock prevents contamination or damage to the wafers during the transfer process.
Original Abstract Submitted
A wafer processing apparatus may include a plurality of equipment front end modules (EFEMs), a wafer transfer chamber, a wafer processing chamber, and a wafer transfer arm. Each of the plurality of EFEMs may include an EFEM chamber, a plurality of load ports provided at a side of the EFEM chamber, and a load lock provided at a side of the EFEM chamber to overlap with at least one of the plurality of load ports in a vertical direction.
