17839235. TAB ARRANGEMENT FOR RETAINING SUPPORT ELEMENTS OF SUBSTRATE SUPPORT simplified abstract (Applied Materials, Inc.)

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TAB ARRANGEMENT FOR RETAINING SUPPORT ELEMENTS OF SUBSTRATE SUPPORT

Organization Name

Applied Materials, Inc.

Inventor(s)

Fred Eric Ruhland of Pleasanton CA (US)

Pavankumar Ramanand Harapanhalli of Bangalore (IN)

Gaurav Shrivastava of Bengaluru (IN)

Yao-Hung Yang of Santa Clara CA (US)

TAB ARRANGEMENT FOR RETAINING SUPPORT ELEMENTS OF SUBSTRATE SUPPORT - A simplified explanation of the abstract

This abstract first appeared for US patent application 17839235 titled 'TAB ARRANGEMENT FOR RETAINING SUPPORT ELEMENTS OF SUBSTRATE SUPPORT

Simplified Explanation

The patent application describes substrate supports that are used in various applications. These supports have the following features:

  • The substrate support consists of a first plate with multiple openings that extend from the top surface to the bottom surface of each opening.
  • Each opening contains three or more tabs that extend towards the top surface of the first plate.
  • The openings also contain support elements that are surrounded by the tabs, ensuring that the support elements are securely held in place.

Potential applications of this technology include:

  • Semiconductor manufacturing: The substrate supports can be used to hold and position semiconductor wafers during various manufacturing processes.
  • Printed circuit board assembly: The supports can be utilized to hold and align circuit boards during assembly and soldering processes.
  • Optics manufacturing: The supports can be used to hold and position optical components during the manufacturing of lenses, mirrors, and other optical devices.

Problems solved by this technology include:

  • Secure retention: The tabs surrounding the support elements ensure that they are held securely in place, preventing any movement or displacement during use.
  • Simplified design: The use of tabs and support elements simplifies the design of the substrate support, making it easier to manufacture and assemble.
  • Enhanced stability: The support elements, along with the tabs, provide increased stability to the substrate, reducing the risk of damage or misalignment.

Benefits of this technology include:

  • Improved manufacturing efficiency: The substrate supports allow for faster and more accurate positioning of substrates, leading to increased productivity in manufacturing processes.
  • Cost savings: The simplified design and ease of assembly result in cost savings during production.
  • Enhanced product quality: The secure retention and stability provided by the supports contribute to improved product quality by reducing the risk of damage or misalignment.


Original Abstract Submitted

Embodiments of substrate supports are provided herein. In some embodiments, a substrate support includes: a first plate having a plurality of openings extending into the first plate from an upper surface of the first plate to a bottom surface of each respective opening of the plurality of openings; a plurality of tabs comprising three or more tabs disposed in each respective opening and extending towards the upper surface of the first plate; and a plurality of support elements disposed in each of the plurality of openings, wherein the plurality of tabs are disposed around each of the plurality of support elements and configured to retain the plurality of support elements in the plurality of openings.

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