Samsung electronics co., ltd. (20240093368). EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME simplified abstract
Contents
- 1 EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Potential Commercial Applications
- 1.9 Possible Prior Art
- 1.10 Unanswered Questions
- 1.11 Original Abstract Submitted
EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME
Organization Name
Inventor(s)
EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240093368 titled 'EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME
Simplified Explanation
The abstract describes an edge ring with protrusions on the inner side surface of the ring body, spaced apart in the circumference direction, and varying distances from the axis.
- The edge ring has a ring body with protrusions on the inner side surface.
- The protrusions are spaced apart in the circumference direction.
- The distance between the axis and a point on the inner side surface between two adjacent protrusions is larger than the distance between the axis and a point where a protrusion is provided.
Potential Applications
The edge ring design could be used in various industrial applications such as semiconductor manufacturing, wafer processing, and precision engineering.
Problems Solved
1. Improved stability and control during manufacturing processes. 2. Enhanced performance and efficiency in precision engineering applications.
Benefits
1. Increased precision and accuracy in manufacturing. 2. Reduced wear and tear on equipment. 3. Enhanced overall product quality.
Potential Commercial Applications
Optimizing edge ring design for semiconductor manufacturing processes.
Possible Prior Art
Prior art may include similar edge ring designs used in precision engineering and manufacturing processes.
Unanswered Questions
How does the edge ring design impact overall manufacturing efficiency?
The article does not provide specific data on the efficiency gains achieved with this edge ring design.
Are there any potential drawbacks or limitations to using this edge ring design?
The article does not address any potential drawbacks or limitations associated with the use of this edge ring design.
Original Abstract Submitted
an edge ring includes a ring body having an axis parallel to a first direction; and a plurality of protrusions provided at an inner side surface of the ring body and protruding toward the axis, the plurality of protrusions being spaced apart from each other in a circumference direction of the edge ring, wherein a first distance between the axis and a first point on the inner side surface of the ring body between two adjacent protrusions of the plurality of protrusions is larger than a second distance between the axis and a second point on the inner side surface of the ring body at which a protrusion of the plurality of protrusions is provided.
