US Patent Application 17733657. AIR CURTAIN DEVICE AND WORKPIECE PROCESSING TOOL simplified abstract
Contents
AIR CURTAIN DEVICE AND WORKPIECE PROCESSING TOOL
Organization Name
Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor(s)
Hsiao-Chieh Chou of Hsinchu (TW)
Chun-Hung Chao of Hsinchu (TW)
Jao Sheng Huang of Hsinchu (TW)
AIR CURTAIN DEVICE AND WORKPIECE PROCESSING TOOL - A simplified explanation of the abstract
This abstract first appeared for US patent application 17733657 titled 'AIR CURTAIN DEVICE AND WORKPIECE PROCESSING TOOL
Simplified Explanation
- The patent application is about using air curtain devices to create barriers of air to separate different areas within a workpiece processing apparatus. - The workpiece processing apparatus has a transfer compartment with a robot that moves workpieces between storage areas and a tool compartment. - The tool compartment contains a tool for processing and refining the workpieces. - Clean dry air (CDA) is circulated through the storage areas. - The air curtains and the circulation of CDA help prevent defects, damages, and degradation of the workpieces while they are being processed.
Original Abstract Submitted
The present disclosure is at least directed to utilizing air curtain devices to form air curtains to separate and isolate areas in which respective workpieces are stored from a transfer compartment within a workpiece processing apparatus. The transfer compartment of the workpiece processing apparatus includes a robot configured to transfer or transport ones of the workpieces to and from these respective storage areas through the transfer compartment and to and from a tool compartment. A tool is present in the tool compartment for processing and refining the respective workpieces. Clean dry air (CDA) may be circulated through the respective storage areas. The air curtains formed by the air curtain devices and the circulation of CDA through the respective storage areas reduces the likelihood of the generation of defects, damages, and degradation of the workpieces when present within the workpiece processing apparatus.
