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Category:CPC H01L21/31116
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Pages in category "CPC H01L21/31116"
The following 88 pages are in this category, out of 88 total.
1
- 17969368. MODIFYING PATTERNED FEATURES USING A DIRECTIONAL ETCH simplified abstract (Applied Materials, Inc.)
- 18210918. METHODS OF SELECTIVELY ETCHING SILICON NITRIDE (Applied Materials, Inc.)
- 18236042. METHODS OF ETCHING SILICON-AND-OXYGEN-CONTAINING FEATURES AT LOW TEMPERATURES (Applied Materials, Inc.)
- 18296503. MULTI LEVEL CONTACT ETCH simplified abstract (Tokyo Electron Limited)
- 18376053. LINE EDGE ROUGHNESS (LER) IMPROVEMENT OF RESIST PATTERNS (Applied Materials, Inc.)
- 18395879. ETCHING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
- 18453843. Etch Selectivity Modulation by Fluorocarbon Treatment (Tokyo Electron Limited)
- 18482401. SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
- 18705932. MODIFICATION OF METAL-CONTAINING SURFACES IN HIGH ASPECT RATIO PLASMA ETCHING (LAM RESEARCH CORPORATION)
- 18749528. METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract (FUJI ELECTRIC CO., LTD.)
- 18826923. METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM (Kokusai Electric Corporation)
- 18865846. REDUCED TEMPERATURE ETCHING OF DOPED SILICON OXIDE (Lam Research Corporation)
- 18896372. ETCHING METHOD (Hitachi High-Tech Corporation)
- 18964049. ETCHING METHOD AND PLASMA PROCESSING APPARATUS (Tokyo Electron Limited)
- 18971817. MANUFACTURING METHOD OF SEMICONDUCTOR MEMORY DEVICE (SK hynix Inc.)
- 19017838. ETCHING METHOD AND PLASMA PROCESSING APPARATUS (Tokyo Electron Limited)
2
- 20250174464. Method Devi (CENTRAL GLASS , LIMITED)
- 20250183051. Selective Precision E (Lam Research)
- 20250183052. Processing Method P (Tokyo Electron Limited)
- 20250218788. Substrate Stress Manag (Applied Materials, .)
- 20250218789. Substrate Processing Method (TES .,)
- 20250232983. Etching Method, (CENTRAL GLASS , LIMITED)
A
- AJOU UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION Patent Application Trends in 2024
- Applied materials, inc. (20240420962). METHODS OF SELECTIVELY ETCHING SILICON NITRIDE
- Applied materials, inc. (20250069895). METHODS OF ETCHING SILICON-AND-OXYGEN-CONTAINING FEATURES AT LOW TEMPERATURES
- Applied materials, inc. (20250112056). LINE EDGE ROUGHNESS (LER) IMPROVEMENT OF RESIST PATTERNS
- APPLIED MATERIALS, INC. Patent Application Trends in 2025
- Applied Materials, Inc. patent applications on April 3rd, 2025
- Applied Materials, Inc. patent applications on December 19th, 2024
- Applied Materials, Inc. patent applications on February 13th, 2025
- Applied Materials, Inc. patent applications on February 27th, 2025
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- SAMSUNG ELECTRONICS CO., LTD Patent Application Trends in 2024
- Samsung Electronics Co., Ltd. Patent Application Trends in 2024
- SAMSUNG ELECTRONICS CO., LTD. Patent Application Trends in 2024
- Samsung electronics Co., Ltd. Patent Application Trends in 2024
- Samsung electronics CO., LTD. Patent Application Trends in 2025
- SAMSUNG ELECTRONICS CO., LTD. Patent Application Trends in 2025
- SAMSUNG ELECTRONICS CO.,LTD Patent Application Trends in 2024
- SAMSUNG ELECTRONICS CO.,LTD. Patent Application Trends in 2024
- SEMES CO., LTD. Patent Application Trends in 2024
- Shin-Etsu Chemical Co., Ltd. Patent Application Trends in 2024
- SK hynix Inc. Patent Application Trends in 2025
- STMicroelectronics (Tours) SAS Patent Application Trends in 2024
- STMicroelectronics International N.V. Patent Application Trends in 2024
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- Taiwan Semiconductor Manufacturing Co., Ltd Patent Application Trends in 2024
- Taiwan Semiconductor Manufacturing Co., Ltd. Patent Application Trends in 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. Patent Application Trends in 2025
- Taiwan Semiconductor Manufacturing Company Limited Patent Application Trends in 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. Patent Application Trends in 2025
- Taiwan Semiconductor Manufacturing Company Patent Application Trends in 2025
- Taiwan semiconductor manufacturing company, ltd. (20240339329). GAS PHASE TREATMENT FOR MANUFACTURING SEMICONDUCTOR STRUCTURE simplified abstract
- Taiwan Semiconductor Manufacturing Company, Ltd. Patent Application Trends in 2024
- Taiwan Semiconductor Manufacturing Company, Ltd. Patent Application Trends in 2025
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. Patent Application Trends in 2025
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. patent applications on October 10th, 2024
- Tokyo electron limited (20240339328). MULTI LEVEL CONTACT ETCH simplified abstract
- Tokyo electron limited (20250149342). ETCHING METHOD AND PLASMA PROCESSING APPARATUS
- TOKYO ELECTRON LIMITED Patent Application Trends in 2024
- Tokyo Electron Limited Patent Application Trends in 2024
- TOKYO ELECTRON LIMITED Patent Application Trends in 2025
- Tokyo Electron Limited Patent Application Trends in 2025
- Tokyo Electron Limited patent applications on February 6th, 2025
- Tokyo Electron Limited patent applications on March 6th, 2025
- Tokyo Electron Limited patent applications on May 8th, 2025
- Tokyo Electron Limited patent applications on October 10th, 2024