LAM RESEARCH CORPORATION Patent Application Trends in 2025
LAM RESEARCH CORPORATION Patent Filing Activity
LAM RESEARCH CORPORATION patent applications in 2025
Top 10 Technology Areas
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- C23C16/52 (Controlling or regulating the coating process {()
- H01L21/0228 ({deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD})
- Count: 10 patents
- Example: 20250069882. SILICON NITRIDE DEPOSITION (Lam Research Corporation)
- H01J2237/334 (ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps)
- H01J37/32183 ({Matching circuits})
- C23C16/45553 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion)
- H01L21/6833 (for supporting or gripping (for conveying)
- H01J37/32715 (Gas-filled discharge tubes (heating by discharge)
- H01L21/02274 ({the layer being a laminate, i.e. composed of sublayers, e.g. stacks of alternating high-k metal oxides (adhesion layers or buffer layers)
- C23C16/45565 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion)
- H01J37/32091 (Gas-filled discharge tubes (heating by discharge)
- Count: 6 patents
- Example: 20250006470. EDGE CAPACITIVELY COUPLED PLASMA CHAMBER STRUCTURE (Lam Research Corporation)
Emerging Technology Areas
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- G01R27/06 (Measuring reflection coefficients; Measuring standing-wave ratio)
- Count: 1 patents
- Example: 20250015819. CLOSED-LOOP MULTIPLE-OUTPUT RADIO FREQUENCY (RF) MATCHING (Lam Research Corporation)
- H04B1/0483 (Circuits)
- Count: 1 patents
- Example: 20250015819. CLOSED-LOOP MULTIPLE-OUTPUT RADIO FREQUENCY (RF) MATCHING (Lam Research Corporation)
- H01L21/68721 (using mechanical means, e.g. chucks, clamps or pinches {(using elecrostatic chucks)
- H01L21/0206 ({during, before or after processing of insulating layers})
- H01L21/02189 (SEMICONDUCTOR DEVICES NOT COVERED BY CLASS)
- Count: 1 patents
- Example: 20250014904. SELECTIVE PROCESSING WITH ETCH RESIDUE-BASED INHIBITORS (Lam Research Corporation)
- H01L21/02175 ({characterised by the metal ()
- Count: 1 patents
- Example: 20250014904. SELECTIVE PROCESSING WITH ETCH RESIDUE-BASED INHIBITORS (Lam Research Corporation)
- H01L21/0212 (SEMICONDUCTOR DEVICES NOT COVERED BY CLASS)
- Count: 1 patents
- Example: 20250014904. SELECTIVE PROCESSING WITH ETCH RESIDUE-BASED INHIBITORS (Lam Research Corporation)
- C23C16/45534 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion)
- Count: 1 patents
- Example: 20250014904. SELECTIVE PROCESSING WITH ETCH RESIDUE-BASED INHIBITORS (Lam Research Corporation)
- H01L21/28562 (from a gas or vapour, e.g. condensation)
- Count: 1 patents
- Example: 20250014904. SELECTIVE PROCESSING WITH ETCH RESIDUE-BASED INHIBITORS (Lam Research Corporation)
- C23C28/40 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion)
- Count: 1 patents
- Example: 20250014893. ATOMIC LAYER DEPOSITION SEAM REDUCTION (Lam Research Corporation)
Top Inventors
- Bart J. Van Schravendijk of Palo Alto CA (US) (6 patents)
- Awnish Gupta of Hillsboro OR (US) (5 patents)
- Dustin Zachary Austin of Tigard OR (US) (4 patents)
- Ramesh Chandrasekharan of Lake Oswego OR (US) (3 patents)
- Anand CHANDRASHEKAR of Fremont CA (US) (3 patents)
- Jon Henri of West Linn OR (US) (3 patents)
- Easwar Srinivasan of Portland OR (US) (3 patents)
- Alexei Marakhtanov of Albany CA (US) (3 patents)
- John Holland of San Jose CA (US) (3 patents)
- Richard M. Blank of San Jose CA (US) (3 patents)
Patent Categories
Geographical Distribution of Inventors
Geographical Distribution of US Inventors
Categories:
- LAM RESEARCH CORPORATION
- Companies
- CPC H01L21/02274
- CPC H01L21/0217
- CPC H01L21/02211
- CPC H01L21/28518
- CPC C23C16/42
- CPC C23C16/45544
- CPC C23C16/45553
- CPC C23C16/52
- CPC H01L21/67017
- CPC H01L21/67167
- CPC H01L21/6833
- CPC H01J37/32715
- CPC H01J2237/2007
- CPC H01L21/76876
- CPC C23C16/0281
- CPC C23C16/045
- CPC C23C16/56
- CPC H01L21/28556
- CPC H01L21/76877
- CPC C23C16/34
- CPC G03F7/0042
- CPC G03F7/091
- CPC G03F7/094
- CPC H01J37/32724
- CPC C23C16/4586
- CPC H01J37/32926
- CPC H01J37/32935
- CPC H01L21/67248
- CPC C23C16/481
- CPC H01J37/321
- CPC H01J37/3244
- CPC H01J37/32706
- CPC H01L21/67069
- CPC H01L21/6831
- CPC C23C16/345
- CPC C23C16/45527
- CPC H01L21/0228
- CPC H01L21/76826
- CPC C23C16/08
- CPC H01L21/32051
- CPC H01L21/76879
- CPC H03H7/40
- CPC C23C16/458
- CPC C23C16/505
- CPC C23C16/455
- CPC C23C16/4402
- CPC C23C16/45512
- CPC C23C16/45565
- CPC H01J37/32743
- CPC H01J2237/332
- CPC H01J2237/334
- CPC G01N27/041
- CPC C23C14/52
- CPC G01N33/20
- CPC H01J37/32522
- CPC H01J37/32513
- CPC H01L21/67742
- CPC H01L21/68742
- CPC H01J37/32541
- CPC H01J37/32091
- CPC H01J37/32174
- CPC H01J37/32568
- CPC H01J37/32577
- CPC H01J37/32642
- CPC B08B1/40
- CPC B08B5/02
- CPC H01L21/67161
- CPC B05B1/14
- CPC B24B53/017
- CPC B24B37/34
- CPC C23C16/45561
- CPC H01J37/32449
- CPC C23C2/003
- CPC C23C16/4558
- CPC H01L21/02002
- CPC H01L21/02104
- CPC G05B19/41865
- CPC C23C14/54
- CPC G05B19/41885
- CPC G05B2219/39001
- CPC G05B2219/45031
- CPC G05B2219/45212
- CPC H01J37/32128
- CPC H01J37/32183
- CPC H01L21/2256
- CPC H01L21/02164
- CPC H01L21/022
- CPC H01L21/02321
- CPC H01L21/2257
- CPC H01L21/68707
- CPC B65G47/90
- CPC H01J37/32733
- CPC H01J2237/3321
- CPC C23C16/45525
- CPC C23C16/4585
- CPC C25D17/001
- CPC C25D5/08
- CPC C25D7/12
- CPC C25D17/004
- CPC C25D17/06
- CPC C25D17/12
- CPC G01J5/061
- CPC G01J5/10
- CPC H01J37/32807
- CPC H01L21/68757
- CPC H01L21/68785
- CPC H01J2237/3341
- CPC H01J37/32862
- CPC H01J37/32357
- CPC H01J37/32899
- CPC H01J2237/335
- CPC H01L21/67288
- CPC H01L21/76844
- CPC H01L21/76856
- CPC H01J37/3211
- CPC H01J37/32165
- CPC H01J37/3299
- CPC G01R31/64
- CPC G03F7/36
- CPC G03F7/32
- CPC G03F7/40
- CPC G03F7/70033
- CPC G03F7/70525
- CPC H01L21/0274
- CPC H03H7/38
- CPC H01J2237/3343
- CPC C23C16/4405
- CPC C23C16/4408
- CPC H01L21/02315
- CPC C23C16/04
- CPC C23C16/50
- CPC H01J37/32816
- CPC C23C16/4581
- CPC H01J37/32082
- CPC H01L21/68735
- CPC H01L21/6875
- CPC H01J2237/2005
- CPC H01L21/68792
- CPC H01L21/68
- CPC G01K11/32
- CPC G01K1/08
- CPC G01K1/14
- CPC G01K11/22
- CPC G03F7/427
- CPC H01L21/31116
- CPC G05D11/138
- CPC H01L21/67201
- CPC H01J37/32146
- CPC H01L21/3065
- CPC H01J2237/3347
- CPC H01L21/76807
- CPC C23C16/26
- CPC C23C16/403
- CPC C23C16/405
- CPC C23C16/452
- CPC H01L21/76831
- CPC H01L23/53238
- CPC H01L23/53276
- CPC C23C16/45557
- CPC C23C16/0209
- CPC C23C16/4583
- CPC F16H25/24
- CPC F16H2025/2053
- CPC F16H2025/2062
- CPC H01L21/28568
- CPC C23C16/06
- CPC H01L23/53257
- CPC H10B12/34
- CPC H10B41/27
- CPC H10B43/27
- CPC H01L21/67766
- CPC B25J9/0087
- CPC B25J9/042
- CPC B25J9/1682
- CPC H01L21/67781
- CPC H05K7/20272
- CPC H05K7/20927
- CPC H01L21/67011
- CPC G01J5/0853
- CPC G01J5/0096
- CPC G01K1/026
- CPC G01N33/0047
- CPC C23C16/45538
- CPC H01L21/32136
- CPC C04B41/5346
- CPC C04B41/91
- CPC C23C16/0227
- CPC C23C16/401
- CPC H01L21/0337
- CPC H01L21/31122
- CPC H01L21/31138
- CPC H01L21/32139
- CPC H01L21/465
- CPC H01L21/467
- CPC H01L21/67259
- CPC H01L21/67276
- CPC H01L21/02535
- CPC H01L24/40
- CPC H01L24/48
- CPC H01L2224/37147
- CPC H01L2224/4005
- CPC H01L2224/40225
- CPC H01L2224/48091
- CPC H01L2224/48227
- CPC H01L2224/48647
- CPC H01L2224/49175
- CPC C23C16/0245
- CPC C23C16/36
- CPC C23C16/4554
- CPC C23C16/46
- CPC H05B3/78
- CPC C25D7/123
- CPC C25D17/008
- CPC C25D21/12
- CPC F16B33/06
- CPC F16B33/008
- CPC H01J37/32853
- CPC H01J2237/3355
- CPC G03F1/76
- CPC C23C14/56
- CPC C23C16/44
- CPC C23C18/143
- CPC C23C18/145
- CPC C23C18/1612
- CPC C23C18/165
- CPC C23C18/182
- CPC G03F7/0043
- CPC G03F7/16
- CPC G03F7/167
- CPC G03F7/26
- CPC G03F7/70808
- CPC H01L21/0332
- CPC H01L21/3213
- CPC H01L21/67213
- CPC G03F7/2004
- CPC G03F7/38
- CPC G03F7/405
- CPC H01J37/32119
- CPC H01J2237/3348
- CPC H01J2237/202
- CPC H01L21/67103
- CPC H01L21/67109
- CPC C23C16/45542
- CPC H01L21/02318
- CPC C23C16/402
- CPC C23C16/45536
- CPC C23C16/042
- CPC H10B12/01
- CPC H10B41/20
- CPC H10B43/20
- CPC H01J2237/3327
- CPC H01L21/31055
- CPC H01L21/31144
- CPC H01J2237/002
- CPC H01L21/67115
- CPC H03K3/017
- CPC H03K5/1565
- CPC H05B1/0233
- CPC C07F7/1804
- CPC H01L21/02266
- CPC C23C14/08
- CPC C23C14/34
- CPC C23C16/40
- CPC C23C28/04
- CPC C23C28/40
- CPC H01L21/28562
- CPC C23C16/45534
- CPC H01L21/0212
- CPC H01L21/02175
- CPC H01L21/02189
- CPC H01L21/0206
- CPC H01L21/68721
- CPC H04B1/0483
- CPC G01R27/06
- Patent Trends by Company in 2025