ULVAC, Inc. Patent Application Trends in 2025
ULVAC, Inc. Patent Filing Activity
ULVAC, Inc. patent applications in 2025
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Top 10 Technology Areas
- H01J37/3244 (Gas-filled discharge tubes (heating by discharge)
- Count: 2 patents
- Example: 20250069858. PLASMA PROCESSING APPARATUS AND CONTROL METHOD THEREFOR (ULVAC, INC.)
- H01J37/32577 (Gas-filled discharge tubes (heating by discharge)
- Count: 1 patents
- Example: 20250069858. PLASMA PROCESSING APPARATUS AND CONTROL METHOD THEREFOR (ULVAC, INC.)
- H01J37/09 (ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps)
- Count: 1 patents
- Example: 20250069858. PLASMA PROCESSING APPARATUS AND CONTROL METHOD THEREFOR (ULVAC, INC.)
- H01L21/31116 ({by dry-etching})
- Count: 1 patents
- Example: 20250054731. ETCHING METHOD (ULVAC, INC.)
- H01J2237/334 (ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps)
- Count: 1 patents
- Example: 20250054731. ETCHING METHOD (ULVAC, INC.)
Emerging Technology Areas
- H01J2237/334 (ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps)
- Count: 1 patents
- Example: 20250054731. ETCHING METHOD (ULVAC, INC.)
- H01L21/31116 ({by dry-etching})
- Count: 1 patents
- Example: 20250054731. ETCHING METHOD (ULVAC, INC.)
- H01J37/09 (ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps)
- Count: 1 patents
- Example: 20250069858. PLASMA PROCESSING APPARATUS AND CONTROL METHOD THEREFOR (ULVAC, INC.)
- H01J37/32577 (Gas-filled discharge tubes (heating by discharge)
- Count: 1 patents
- Example: 20250069858. PLASMA PROCESSING APPARATUS AND CONTROL METHOD THEREFOR (ULVAC, INC.)
- H01J37/3244 (Gas-filled discharge tubes (heating by discharge)
- Count: 2 patents
- Example: 20250069858. PLASMA PROCESSING APPARATUS AND CONTROL METHOD THEREFOR (ULVAC, INC.)
Top Inventors
- Kenta DOI (1 patent)
- Toshiyuki NAKAMURA (1 patent)
- Yasuhiro MORIKAWA (1 patent)
- Kensuke AKAZAWA (1 patent)
- Daisuke HIRONIWA (1 patent)
- Kazuhiko Tonari (1 patent)
- Youhei Ono (1 patent)
- Jinhyeok Son (1 patent)
- Jun-chang Park (1 patent)
- Hyunhwa Lee (1 patent)
Patent Categories
Geographical Distribution of Inventors
