Difference between revisions of "Applied Materials, Inc. patent applications published on November 9th, 2023"
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==Patent applications for Applied Materials, Inc. on November 9th, 2023== | ==Patent applications for Applied Materials, Inc. on November 9th, 2023== | ||
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Fei Wang | Fei Wang | ||
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===CHEMICAL MECHANICAL POLISHING TEMPERATURE SCANNING APPARATUS FOR TEMPERATURE CONTROL ([[US Patent Application 18356604. CHEMICAL MECHANICAL POLISHING TEMPERATURE SCANNING APPARATUS FOR TEMPERATURE CONTROL simplified abstract|18356604]])=== | ===CHEMICAL MECHANICAL POLISHING TEMPERATURE SCANNING APPARATUS FOR TEMPERATURE CONTROL ([[US Patent Application 18356604. CHEMICAL MECHANICAL POLISHING TEMPERATURE SCANNING APPARATUS FOR TEMPERATURE CONTROL simplified abstract|18356604]])=== | ||
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Hari Soundararajan | Hari Soundararajan | ||
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===Carrier Head Membrane With Regions of Different Roughness ([[US Patent Application 18351260. Carrier Head Membrane With Regions of Different Roughness simplified abstract|18351260]])=== | ===Carrier Head Membrane With Regions of Different Roughness ([[US Patent Application 18351260. Carrier Head Membrane With Regions of Different Roughness simplified abstract|18351260]])=== | ||
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Young J. Paik | Young J. Paik | ||
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===COMPLIANT INNER RING FOR A CHEMICAL MECHANICAL POLISHING SYSTEM ([[US Patent Application 17735655. COMPLIANT INNER RING FOR A CHEMICAL MECHANICAL POLISHING SYSTEM simplified abstract|17735655]])=== | ===COMPLIANT INNER RING FOR A CHEMICAL MECHANICAL POLISHING SYSTEM ([[US Patent Application 17735655. COMPLIANT INNER RING FOR A CHEMICAL MECHANICAL POLISHING SYSTEM simplified abstract|17735655]])=== | ||
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Jeonghoon Oh | Jeonghoon Oh | ||
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===POLISHING HEAD WITH LOCAL INNER RING DOWNFORCE CONTROL ([[US Patent Application 17735674. POLISHING HEAD WITH LOCAL INNER RING DOWNFORCE CONTROL simplified abstract|17735674]])=== | ===POLISHING HEAD WITH LOCAL INNER RING DOWNFORCE CONTROL ([[US Patent Application 17735674. POLISHING HEAD WITH LOCAL INNER RING DOWNFORCE CONTROL simplified abstract|17735674]])=== | ||
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Jeonghoon Oh | Jeonghoon Oh | ||
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===METHODS, SYSTEMS, AND APPARATUS FOR INKJET PRINTING SELF-ASSEMBLED MONOLOAYER (SAM) STRUCTURES ON SUBSTRATES ([[US Patent Application 18142305. METHODS, SYSTEMS, AND APPARATUS FOR INKJET PRINTING SELF-ASSEMBLED MONOLOAYER (SAM) STRUCTURES ON SUBSTRATES simplified abstract|18142305]])=== | ===METHODS, SYSTEMS, AND APPARATUS FOR INKJET PRINTING SELF-ASSEMBLED MONOLOAYER (SAM) STRUCTURES ON SUBSTRATES ([[US Patent Application 18142305. METHODS, SYSTEMS, AND APPARATUS FOR INKJET PRINTING SELF-ASSEMBLED MONOLOAYER (SAM) STRUCTURES ON SUBSTRATES simplified abstract|18142305]])=== | ||
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Yingdong LUO | Yingdong LUO | ||
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===ALD CYCLE TIME REDUCTION USING PROCESS CHAMBER LID WITH TUNABLE PUMPING ([[US Patent Application 18224206. ALD CYCLE TIME REDUCTION USING PROCESS CHAMBER LID WITH TUNABLE PUMPING simplified abstract|18224206]])=== | ===ALD CYCLE TIME REDUCTION USING PROCESS CHAMBER LID WITH TUNABLE PUMPING ([[US Patent Application 18224206. ALD CYCLE TIME REDUCTION USING PROCESS CHAMBER LID WITH TUNABLE PUMPING simplified abstract|18224206]])=== | ||
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Muhannad Mustafa | Muhannad Mustafa | ||
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===APPARATUS AND METHODS TO PROMOTE WAFER EDGE TEMPERATURE UNIFORMITY ([[US Patent Application 17862138. APPARATUS AND METHODS TO PROMOTE WAFER EDGE TEMPERATURE UNIFORMITY simplified abstract|17862138]])=== | ===APPARATUS AND METHODS TO PROMOTE WAFER EDGE TEMPERATURE UNIFORMITY ([[US Patent Application 17862138. APPARATUS AND METHODS TO PROMOTE WAFER EDGE TEMPERATURE UNIFORMITY simplified abstract|17862138]])=== | ||
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Zubin HUANG | Zubin HUANG | ||
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===RF MEASUREMENT FROM A TRANSMISSION LINE SENSOR ([[US Patent Application 17737682. RF MEASUREMENT FROM A TRANSMISSION LINE SENSOR simplified abstract|17737682]])=== | ===RF MEASUREMENT FROM A TRANSMISSION LINE SENSOR ([[US Patent Application 17737682. RF MEASUREMENT FROM A TRANSMISSION LINE SENSOR simplified abstract|17737682]])=== | ||
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David Coumou | David Coumou | ||
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===METHODS AND MECHANISMS FOR ADJUSTING FILM DEPOSITION PARAMETERS DURING SUBSTRATE MANUFACTURING ([[US Patent Application 17737318. METHODS AND MECHANISMS FOR ADJUSTING FILM DEPOSITION PARAMETERS DURING SUBSTRATE MANUFACTURING simplified abstract|17737318]])=== | ===METHODS AND MECHANISMS FOR ADJUSTING FILM DEPOSITION PARAMETERS DURING SUBSTRATE MANUFACTURING ([[US Patent Application 17737318. METHODS AND MECHANISMS FOR ADJUSTING FILM DEPOSITION PARAMETERS DURING SUBSTRATE MANUFACTURING simplified abstract|17737318]])=== | ||
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Mitesh Sanghvi | Mitesh Sanghvi | ||
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===HIGH BANDWIDTH ARCHITECTURE FOR CENTRALIZED COHERENT CONTROL AT THE EDGE OF PROCESSING TOOL ([[US Patent Application 17737659. HIGH BANDWIDTH ARCHITECTURE FOR CENTRALIZED COHERENT CONTROL AT THE EDGE OF PROCESSING TOOL simplified abstract|17737659]])=== | ===HIGH BANDWIDTH ARCHITECTURE FOR CENTRALIZED COHERENT CONTROL AT THE EDGE OF PROCESSING TOOL ([[US Patent Application 17737659. HIGH BANDWIDTH ARCHITECTURE FOR CENTRALIZED COHERENT CONTROL AT THE EDGE OF PROCESSING TOOL simplified abstract|17737659]])=== | ||
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David Coumou | David Coumou | ||
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===CONTROL AND PREDICTION OF MULTIPLE PLASMA COUPLING SURFACES AND CORRESPONDING POWER TRANSFER ([[US Patent Application 17737670. CONTROL AND PREDICTION OF MULTIPLE PLASMA COUPLING SURFACES AND CORRESPONDING POWER TRANSFER simplified abstract|17737670]])=== | ===CONTROL AND PREDICTION OF MULTIPLE PLASMA COUPLING SURFACES AND CORRESPONDING POWER TRANSFER ([[US Patent Application 17737670. CONTROL AND PREDICTION OF MULTIPLE PLASMA COUPLING SURFACES AND CORRESPONDING POWER TRANSFER simplified abstract|17737670]])=== | ||
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David Coumou | David Coumou | ||
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===OPTICAL DEVICE IMPROVEMENT ([[US Patent Application 18131997. OPTICAL DEVICE IMPROVEMENT simplified abstract|18131997]])=== | ===OPTICAL DEVICE IMPROVEMENT ([[US Patent Application 18131997. OPTICAL DEVICE IMPROVEMENT simplified abstract|18131997]])=== | ||
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Yue CHEN | Yue CHEN | ||
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===TEMPERATURE AND BIAS CONTROL OF EDGE RING ([[US Patent Application 18356915. TEMPERATURE AND BIAS CONTROL OF EDGE RING simplified abstract|18356915]])=== | ===TEMPERATURE AND BIAS CONTROL OF EDGE RING ([[US Patent Application 18356915. TEMPERATURE AND BIAS CONTROL OF EDGE RING simplified abstract|18356915]])=== | ||
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James ROGERS | James ROGERS | ||
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===AUTONOMOUS FREQUENCY RETRIEVAL FROM PLASMA POWER SOURCES ([[US Patent Application 17737665. AUTONOMOUS FREQUENCY RETRIEVAL FROM PLASMA POWER SOURCES simplified abstract|17737665]])=== | ===AUTONOMOUS FREQUENCY RETRIEVAL FROM PLASMA POWER SOURCES ([[US Patent Application 17737665. AUTONOMOUS FREQUENCY RETRIEVAL FROM PLASMA POWER SOURCES simplified abstract|17737665]])=== | ||
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David Coumou | David Coumou | ||
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===LARGE AREA GAPFILL USING VOLUMETRIC EXPANSION ([[US Patent Application 17737340. LARGE AREA GAPFILL USING VOLUMETRIC EXPANSION simplified abstract|17737340]])=== | ===LARGE AREA GAPFILL USING VOLUMETRIC EXPANSION ([[US Patent Application 17737340. LARGE AREA GAPFILL USING VOLUMETRIC EXPANSION simplified abstract|17737340]])=== | ||
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Supriya Ghosh | Supriya Ghosh | ||
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===SILICON-AND-CARBON-CONTAINING MATERIALS WITH LOW DIELECTRIC CONSTANTS ([[US Patent Application 17737328. SILICON-AND-CARBON-CONTAINING MATERIALS WITH LOW DIELECTRIC CONSTANTS simplified abstract|17737328]])=== | ===SILICON-AND-CARBON-CONTAINING MATERIALS WITH LOW DIELECTRIC CONSTANTS ([[US Patent Application 17737328. SILICON-AND-CARBON-CONTAINING MATERIALS WITH LOW DIELECTRIC CONSTANTS simplified abstract|17737328]])=== | ||
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Zeqing Shen | Zeqing Shen | ||
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===PULSED ETCH PROCESS ([[US Patent Application 17738526. PULSED ETCH PROCESS simplified abstract|17738526]])=== | ===PULSED ETCH PROCESS ([[US Patent Application 17738526. PULSED ETCH PROCESS simplified abstract|17738526]])=== | ||
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Yifeng Zhou | Yifeng Zhou | ||
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===LOW TEMPERATURE CARBON GAPFILL ([[US Patent Application 17737311. LOW TEMPERATURE CARBON GAPFILL simplified abstract|17737311]])=== | ===LOW TEMPERATURE CARBON GAPFILL ([[US Patent Application 17737311. LOW TEMPERATURE CARBON GAPFILL simplified abstract|17737311]])=== | ||
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Supriya Ghosh | Supriya Ghosh | ||
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===WAFER FILM FRAME CARRIER ([[US Patent Application 17735623. WAFER FILM FRAME CARRIER simplified abstract|17735623]])=== | ===WAFER FILM FRAME CARRIER ([[US Patent Application 17735623. WAFER FILM FRAME CARRIER simplified abstract|17735623]])=== | ||
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Jason A. Rye | Jason A. Rye | ||
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===COAXIAL LIFT DEVICE WITH DYNAMIC LEVELING ([[US Patent Application 18356553. COAXIAL LIFT DEVICE WITH DYNAMIC LEVELING simplified abstract|18356553]])=== | ===COAXIAL LIFT DEVICE WITH DYNAMIC LEVELING ([[US Patent Application 18356553. COAXIAL LIFT DEVICE WITH DYNAMIC LEVELING simplified abstract|18356553]])=== | ||
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Jason M. SCHALLER | Jason M. SCHALLER | ||
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===COAXIAL LIFT DEVICE WITH DYNAMIC LEVELING ([[US Patent Application 18356579. COAXIAL LIFT DEVICE WITH DYNAMIC LEVELING simplified abstract|18356579]])=== | ===COAXIAL LIFT DEVICE WITH DYNAMIC LEVELING ([[US Patent Application 18356579. COAXIAL LIFT DEVICE WITH DYNAMIC LEVELING simplified abstract|18356579]])=== | ||
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Jason M. SCHALLER | Jason M. SCHALLER | ||
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===SELF-ALIGNMENT ETCHING OF INTERCONNECT LAYERS ([[US Patent Application 18224861. SELF-ALIGNMENT ETCHING OF INTERCONNECT LAYERS simplified abstract|18224861]])=== | ===SELF-ALIGNMENT ETCHING OF INTERCONNECT LAYERS ([[US Patent Application 18224861. SELF-ALIGNMENT ETCHING OF INTERCONNECT LAYERS simplified abstract|18224861]])=== | ||
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Suketu Arun PARIKH | Suketu Arun PARIKH | ||
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===CONFORMAL METAL DICHALCOGENIDES ([[US Patent Application 17739856. CONFORMAL METAL DICHALCOGENIDES simplified abstract|17739856]])=== | ===CONFORMAL METAL DICHALCOGENIDES ([[US Patent Application 17739856. CONFORMAL METAL DICHALCOGENIDES simplified abstract|17739856]])=== | ||
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Chandan Das | Chandan Das | ||
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===DRY TREATMENT FOR SURFACE LOSS REMOVAL IN MICRO-LED STRUCTURES ([[US Patent Application 17736843. DRY TREATMENT FOR SURFACE LOSS REMOVAL IN MICRO-LED STRUCTURES simplified abstract|17736843]])=== | ===DRY TREATMENT FOR SURFACE LOSS REMOVAL IN MICRO-LED STRUCTURES ([[US Patent Application 17736843. DRY TREATMENT FOR SURFACE LOSS REMOVAL IN MICRO-LED STRUCTURES simplified abstract|17736843]])=== | ||
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Michel Khoury | Michel Khoury | ||
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===IMPEDANCE TUNING UTILITY OF VECTOR SPACE DEFINED BY TRANSMISSION LINE QUANTITIES ([[US Patent Application 17737677. IMPEDANCE TUNING UTILITY OF VECTOR SPACE DEFINED BY TRANSMISSION LINE QUANTITIES simplified abstract|17737677]])=== | ===IMPEDANCE TUNING UTILITY OF VECTOR SPACE DEFINED BY TRANSMISSION LINE QUANTITIES ([[US Patent Application 17737677. IMPEDANCE TUNING UTILITY OF VECTOR SPACE DEFINED BY TRANSMISSION LINE QUANTITIES simplified abstract|17737677]])=== | ||
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Revision as of 05:37, 12 November 2023
Contents
- 1 Patent applications for Applied Materials, Inc. on November 9th, 2023
- 1.1 OZONE-BASED LOW TEMPERATURE SILICON OXIDE COATING FOR PHARMACEUTICAL APPLICATIONS (18199625)
- 1.2 CHEMICAL MECHANICAL POLISHING TEMPERATURE SCANNING APPARATUS FOR TEMPERATURE CONTROL (18356604)
- 1.3 Carrier Head Membrane With Regions of Different Roughness (18351260)
- 1.4 COMPLIANT INNER RING FOR A CHEMICAL MECHANICAL POLISHING SYSTEM (17735655)
- 1.5 POLISHING HEAD WITH LOCAL INNER RING DOWNFORCE CONTROL (17735674)
- 1.6 METHODS, SYSTEMS, AND APPARATUS FOR INKJET PRINTING SELF-ASSEMBLED MONOLOAYER (SAM) STRUCTURES ON SUBSTRATES (18142305)
- 1.7 ALD CYCLE TIME REDUCTION USING PROCESS CHAMBER LID WITH TUNABLE PUMPING (18224206)
- 1.8 APPARATUS AND METHODS TO PROMOTE WAFER EDGE TEMPERATURE UNIFORMITY (17862138)
- 1.9 RF MEASUREMENT FROM A TRANSMISSION LINE SENSOR (17737682)
- 1.10 METHODS AND MECHANISMS FOR ADJUSTING FILM DEPOSITION PARAMETERS DURING SUBSTRATE MANUFACTURING (17737318)
- 1.11 HIGH BANDWIDTH ARCHITECTURE FOR CENTRALIZED COHERENT CONTROL AT THE EDGE OF PROCESSING TOOL (17737659)
- 1.12 CONTROL AND PREDICTION OF MULTIPLE PLASMA COUPLING SURFACES AND CORRESPONDING POWER TRANSFER (17737670)
- 1.13 OPTICAL DEVICE IMPROVEMENT (18131997)
- 1.14 TEMPERATURE AND BIAS CONTROL OF EDGE RING (18356915)
- 1.15 AUTONOMOUS FREQUENCY RETRIEVAL FROM PLASMA POWER SOURCES (17737665)
- 1.16 LARGE AREA GAPFILL USING VOLUMETRIC EXPANSION (17737340)
- 1.17 SILICON-AND-CARBON-CONTAINING MATERIALS WITH LOW DIELECTRIC CONSTANTS (17737328)
- 1.18 PULSED ETCH PROCESS (17738526)
- 1.19 LOW TEMPERATURE CARBON GAPFILL (17737311)
- 1.20 WAFER FILM FRAME CARRIER (17735623)
- 1.21 COAXIAL LIFT DEVICE WITH DYNAMIC LEVELING (18356553)
- 1.22 COAXIAL LIFT DEVICE WITH DYNAMIC LEVELING (18356579)
- 1.23 SELF-ALIGNMENT ETCHING OF INTERCONNECT LAYERS (18224861)
- 1.24 CONFORMAL METAL DICHALCOGENIDES (17739856)
- 1.25 DRY TREATMENT FOR SURFACE LOSS REMOVAL IN MICRO-LED STRUCTURES (17736843)
- 1.26 IMPEDANCE TUNING UTILITY OF VECTOR SPACE DEFINED BY TRANSMISSION LINE QUANTITIES (17737677)
Patent applications for Applied Materials, Inc. on November 9th, 2023
OZONE-BASED LOW TEMPERATURE SILICON OXIDE COATING FOR PHARMACEUTICAL APPLICATIONS (18199625)
Main Inventor
Fei Wang
CHEMICAL MECHANICAL POLISHING TEMPERATURE SCANNING APPARATUS FOR TEMPERATURE CONTROL (18356604)
Main Inventor
Hari Soundararajan
Carrier Head Membrane With Regions of Different Roughness (18351260)
Main Inventor
Young J. Paik
COMPLIANT INNER RING FOR A CHEMICAL MECHANICAL POLISHING SYSTEM (17735655)
Main Inventor
Jeonghoon Oh
POLISHING HEAD WITH LOCAL INNER RING DOWNFORCE CONTROL (17735674)
Main Inventor
Jeonghoon Oh
METHODS, SYSTEMS, AND APPARATUS FOR INKJET PRINTING SELF-ASSEMBLED MONOLOAYER (SAM) STRUCTURES ON SUBSTRATES (18142305)
Main Inventor
Yingdong LUO
ALD CYCLE TIME REDUCTION USING PROCESS CHAMBER LID WITH TUNABLE PUMPING (18224206)
Main Inventor
Muhannad Mustafa
APPARATUS AND METHODS TO PROMOTE WAFER EDGE TEMPERATURE UNIFORMITY (17862138)
Main Inventor
Zubin HUANG
RF MEASUREMENT FROM A TRANSMISSION LINE SENSOR (17737682)
Main Inventor
David Coumou
METHODS AND MECHANISMS FOR ADJUSTING FILM DEPOSITION PARAMETERS DURING SUBSTRATE MANUFACTURING (17737318)
Main Inventor
Mitesh Sanghvi
HIGH BANDWIDTH ARCHITECTURE FOR CENTRALIZED COHERENT CONTROL AT THE EDGE OF PROCESSING TOOL (17737659)
Main Inventor
David Coumou
CONTROL AND PREDICTION OF MULTIPLE PLASMA COUPLING SURFACES AND CORRESPONDING POWER TRANSFER (17737670)
Main Inventor
David Coumou
OPTICAL DEVICE IMPROVEMENT (18131997)
Main Inventor
Yue CHEN
TEMPERATURE AND BIAS CONTROL OF EDGE RING (18356915)
Main Inventor
James ROGERS
AUTONOMOUS FREQUENCY RETRIEVAL FROM PLASMA POWER SOURCES (17737665)
Main Inventor
David Coumou
LARGE AREA GAPFILL USING VOLUMETRIC EXPANSION (17737340)
Main Inventor
Supriya Ghosh
SILICON-AND-CARBON-CONTAINING MATERIALS WITH LOW DIELECTRIC CONSTANTS (17737328)
Main Inventor
Zeqing Shen
PULSED ETCH PROCESS (17738526)
Main Inventor
Yifeng Zhou
LOW TEMPERATURE CARBON GAPFILL (17737311)
Main Inventor
Supriya Ghosh
WAFER FILM FRAME CARRIER (17735623)
Main Inventor
Jason A. Rye
COAXIAL LIFT DEVICE WITH DYNAMIC LEVELING (18356553)
Main Inventor
Jason M. SCHALLER
COAXIAL LIFT DEVICE WITH DYNAMIC LEVELING (18356579)
Main Inventor
Jason M. SCHALLER
SELF-ALIGNMENT ETCHING OF INTERCONNECT LAYERS (18224861)
Main Inventor
Suketu Arun PARIKH
CONFORMAL METAL DICHALCOGENIDES (17739856)
Main Inventor
Chandan Das
DRY TREATMENT FOR SURFACE LOSS REMOVAL IN MICRO-LED STRUCTURES (17736843)
Main Inventor
Michel Khoury
IMPEDANCE TUNING UTILITY OF VECTOR SPACE DEFINED BY TRANSMISSION LINE QUANTITIES (17737677)
Main Inventor
David Coumou