US Patent Application 17737677. IMPEDANCE TUNING UTILITY OF VECTOR SPACE DEFINED BY TRANSMISSION LINE QUANTITIES simplified abstract
IMPEDANCE TUNING UTILITY OF VECTOR SPACE DEFINED BY TRANSMISSION LINE QUANTITIES
Organization Name
Inventor(s)
David Coumou of Webster NY (US)
David Peterson of San Jose CA (US)
IMPEDANCE TUNING UTILITY OF VECTOR SPACE DEFINED BY TRANSMISSION LINE QUANTITIES - A simplified explanation of the abstract
This abstract first appeared for US patent application 17737677 titled 'IMPEDANCE TUNING UTILITY OF VECTOR SPACE DEFINED BY TRANSMISSION LINE QUANTITIES
Simplified Explanation
The patent application describes a method for impedance tuning in a semiconductor processing tool.
- The method involves measuring the voltage and current of a transmission line.
- The measured analog voltage and current signals are converted into digital signals.
- A u-vector is calculated from the digital voltage and current signals.
- The real components of the u-vector are used to calculate the position of a first capacitor (C1).
- The imaginary components of the u-vector are used to calculate the position of a second capacitor (C2).
Original Abstract Submitted
Embodiments disclosed herein include a method of impedance tuning in a semiconductor processing tool. In an embodiment, the method comprises measuring a voltage and a current of a transmission line, converting an analog voltage signal and an analog current signal into a digital voltage signal and a digital current signal, calculating a u-vector from the digital voltage signal and the digital current signal, calculating a C1 position of a first capacitor with real components of the u-vector, and calculating a C2 position of a second capacitor with imaginary components of the u-vector.
