US Patent Application 17737659. HIGH BANDWIDTH ARCHITECTURE FOR CENTRALIZED COHERENT CONTROL AT THE EDGE OF PROCESSING TOOL simplified abstract

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HIGH BANDWIDTH ARCHITECTURE FOR CENTRALIZED COHERENT CONTROL AT THE EDGE OF PROCESSING TOOL

Organization Name

Applied Materials, Inc.


Inventor(s)

David Coumou of Webster NY (US)

HIGH BANDWIDTH ARCHITECTURE FOR CENTRALIZED COHERENT CONTROL AT THE EDGE OF PROCESSING TOOL - A simplified explanation of the abstract

This abstract first appeared for US patent application 17737659 titled 'HIGH BANDWIDTH ARCHITECTURE FOR CENTRALIZED COHERENT CONTROL AT THE EDGE OF PROCESSING TOOL

Simplified Explanation

The abstract describes a processing tool that includes a power supply, an impedance matching network, a cathode, and a processing module.

  • The processing tool is designed to supply power to the cathode through the impedance matching network.
  • The processing module is connected to both the power supply and the impedance matching network.
  • The purpose of the processing tool is not specified in the abstract.


Original Abstract Submitted

Embodiments disclosed herein include a processing tool. In an embodiment, the processing tool comprises a power supply, an impedance matching network coupled to the power supply, a cathode, wherein the power supply is configured to supply power through the impedance matching network to the cathode, and a processing module, wherein the processing module is communicatively coupled to the power supply and the impedance matching network.

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