Category:G03F1/24
- Section G: Physics
- Class G03: Photography; Cinematography; Analogous Techniques Using Waves Other Than Optical Waves; Electrography; Holography
- Subclass G03F: Photomechanical Production of Textured or Patterned Surfaces, e.g., for Printing, for Processing of Semiconductor Devices
- Main Group G03F1/00: Photomechanical, e.g., Photographic, Production of Textured or Patterned Surfaces, e.g., Printed Surfaces, Resist Coatings, For Use in Photomechanical, Photoengraving, Photolithographic Processes; Apparatus Therefor
- Subgroup G03F1/24: Photosensitive materials
The classification "G03F1/24" falls within the realm of physics, specifically focusing on the photomechanical production of textured or patterned surfaces, which is a key process in fields like printing and semiconductor device processing. This subgroup is dedicated to photosensitive materials used in these photomechanical processes. It covers the development, composition, and application of materials that react to light, which are crucial in photolithography – a process widely used in semiconductor manufacturing to create intricate patterns for integrated circuits. The advancements in this area are vital for continuing miniaturization and increasing the complexity of electronic devices.
Pages in category "G03F1/24"
The following 64 pages are in this category, out of 64 total.
1
- 17736772. MANUFACTURING METHOD OF EUV PHOTO MASKS simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)
- 17749033. EXTREME ULTRAVIOLET MASK WITH CAPPING LAYER simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)
- 18123749. EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)
- 18151416. EUV MASKS TO PREVENT CARBON CONTAMINATION simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
- 18180210. REFLECTIVE MASK AND METHOD OF DESIGNING ANTI-REFLECTION PATTERN OF THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- 18320387. EXTREME ULTRAVIOLET (EUV) MASK AND MANUFACTURING METHOD THEREOF simplified abstract (Samsung Electronics Co., Ltd.)
- 18328395. METHOD OF MANUFACTURING PHOTOMASK, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- 18383543. REFLECTIVE MASK FOR EXTREME ULTRAVIOLET LITHOGRAPHY AND A METHOD OF FABRICATING A SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- 18395234. EXTREME ULTRAVIOLET MASK WITH TANTALUM BASE ALLOY ABSORBER simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
- 18402511. EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)
- 18403811. REFLECTION TYPE MASK BLANK AND METHOD FOR MANUFACTURING SAME simplified abstract (AGC Inc.)
- 18407763. EXTREME ULTRA-VIOLET MASK AND MANUFACTURING METHOD THEREOF simplified abstract (Samsung Electronics Co., Ltd.)
- 18413399. EXTREME ULTRAVIOLET MASK AND METHOD OF MANUFACTURING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)
- 18432842. METHOD FOR FABRICATING EUV MASK AND PHOTOMASK USING THE EUV MASK simplified abstract (SK hynix Inc.)
- 18441665. METHOD OF ANNEALING REFLECTIVE PHOTOMASK BY USING LASER simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- 18505485. Substrate with Film for Reflective Mask Blank, and Reflective Mask Blank simplified abstract (Shin-Etsu Chemical Co., Ltd.)
- 18517796. REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD OF MANUFACTURING REFLECTIVE MASK BLANK, AND METHOD OF MANUFACTURING REFLECTIVE MASK simplified abstract (AGC Inc.)
- 18545948. EXTREME ULTRAVIOLET MASK AND METHOD FOR FORMING THE SAME simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
- 18616797. REFLECTIVE MASK BLANK, AND MANUFACTURING METHOD OF REFLECTIVE MASK simplified abstract (SHIN-ETSU CHEMICAL CO., LTD.)
- 18635209. Method Of Critical Dimension Control By Oxygen And Nitrogen Plasma Treatment In Euv Mask simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)
- 18658522. REFLECTIVE MASK simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)
- 18745236. METHODS OF MAKING A SEMICONDUCTOR DEVICE simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)
- 18749170. EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)
- 18820061. REFLECTIVE MASK BLANK, REFLECTIVE MASK, AND MANUFACTURING METHOD THEREFOR (AGC Inc.)
S
- Samsung electronics co., ltd. (20240126161). EXTREME ULTRAVIOLET (EUV) MASK AND MANUFACTURING METHOD THEREOF simplified abstract
- Samsung electronics co., ltd. (20240184192). METHOD OF ANNEALING REFLECTIVE PHOTOMASK BY USING LASER simplified abstract
- Samsung electronics co., ltd. (20240219824). REFLECTIVE MASK FOR EXTREME ULTRAVIOLET LITHOGRAPHY AND A METHOD OF FABRICATING A SEMICONDUCTOR DEVICE USING THE SAME simplified abstract
- Samsung electronics co., ltd. (20240280888). EXTREME ULTRA-VIOLET MASK AND MANUFACTURING METHOD THEREOF simplified abstract
- Samsung electronics co., ltd. (20240280889). EXTREME ULTRAVIOLET MASK AND METHOD OF MANUFACTURING THE SAME simplified abstract
- Samsung Electronics Co., Ltd. patent applications on April 18th, 2024
- Samsung Electronics Co., Ltd. patent applications on August 22nd, 2024
- SAMSUNG ELECTRONICS CO., LTD. patent applications on January 25th, 2024
- Samsung Electronics Co., Ltd. patent applications on July 4th, 2024
- SAMSUNG ELECTRONICS CO., LTD. patent applications on July 4th, 2024
- SAMSUNG ELECTRONICS CO., LTD. patent applications on June 6th, 2024
- Samsung Electronics Co., Ltd. patent applications on June 6th, 2024
- Shin-etsu chemical co., ltd. (20240337916). REFLECTIVE MASK BLANK, AND MANUFACTURING METHOD OF REFLECTIVE MASK simplified abstract
- SHIN-ETSU CHEMICAL CO., LTD. patent applications on October 10th, 2024
- Sk hynix inc. (20240176226). METHOD FOR FABRICATING EUV MASK AND PHOTOMASK USING THE EUV MASK simplified abstract
- SK hynix Inc. patent applications on May 30th, 2024
T
- Taiwan semiconductor manufacturing co., ltd. (20240192581). EXTREME ULTRAVIOLET MASK WITH TANTALUM BASE ALLOY ABSORBER simplified abstract
- Taiwan semiconductor manufacturing co., ltd. (20240192582). EXTREME ULTRAVIOLET MASK AND METHOD FOR FORMING THE SAME simplified abstract
- Taiwan Semiconductor Manufacturing Co., Ltd. patent applications on June 13th, 2024
- Taiwan semiconductor manufacturing company, ltd. (20240134266). EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract
- Taiwan semiconductor manufacturing company, ltd. (20240264520). Method Of Critical Dimension Control By Oxygen And Nitrogen Plasma Treatment In Euv Mask simplified abstract
- Taiwan semiconductor manufacturing company, ltd. (20240302731). REFLECTIVE MASK simplified abstract
- Taiwan semiconductor manufacturing company, ltd. (20240337917). METHODS OF MAKING A SEMICONDUCTOR DEVICE simplified abstract
- Taiwan semiconductor manufacturing company, ltd. (20240337918). EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract
- Taiwan semiconductor manufacturing company, ltd. (20240377720). EUV Lithography Mask With A Porous Reflective Multilayer Structure simplified abstract
- Taiwan semiconductor manufacturing company, ltd. (20240377722). MASK AND METHOD OF FORMING THE SAME simplified abstract
- Taiwan Semiconductor Manufacturing Company, Ltd. patent applications on April 25th, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd. patent applications on August 8th, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. patent applications on February 15th, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd. patent applications on February 8th, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd. patent applications on November 14th, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. patent applications on October 10th, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd. patent applications on September 12th, 2024
U
- US Patent Application 18230968. EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract
- US Patent Application 18232674. PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract
- US Patent Application 18359954. Mask Defect Prevention simplified abstract
- US Patent Application 18361891. EUV PHOTOMASK AND MANUFACTURING METHOD OF THE SAME simplified abstract
- US Patent Application 18365757. EUV MASK BLANK AND METHOD OF MAKING EUV MASK BLANK simplified abstract
- US Patent Application 18366136. EUV Lithography Mask With A Porous Reflective Multilayer Structure simplified abstract
- US Patent Application 18366397. EUV PHOTOMASK AND RELATED METHODS simplified abstract