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20250218963. Die Conductive Vias Embe (Intel)

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DIE AND CONDUCTIVE VIAS EMBEDDED IN A SUBSTRATE

Abstract: an apparatus includes a substrate core, which has a first height between a first surface and a second surface opposite the first surface. a die is within the substrate core. the die may include a deep trench capacitor. the die has a second height between a first side of the die and a second side opposite the first side. the first height is greater than the second height. a plurality of conductive vias extend from a plurality of conductive contacts at the first side of the die to the first surface of the substrate core. a material comprising a dielectric is disposed over the die and encapsulates the plurality of conductive vias. in some embodiments, a bond film is in contact with the second side of the die.

Inventor(s): Hiroki Tanaka, Robert May, Bai Nie, Srinivas Pietambaram, Bohan Shan, Gang Duan, Benjamin Duong, Tolga Acikalin, Soham Agarwal, Jeremy Ecton, Kari Hernandez, Brandon Marin, Pratyush Mishra, Pratyasha Mohapatra, Marcel Said

CPC Classification: H01L23/5386 (the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates ({ takes precedence; manufacture or treatment } ; mountings per se ; {materials }))

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