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20250218847. Configurable Carrier Tra (Intel)

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CONFIGURABLE CARRIER FOR TRANSFER AND SELF-ASSEMBLY OF MULTIPLE INTEGRATED CIRCUIT DEVICES

Abstract: a first carrier comprises a plurality of regions. each region comprises a first zone and a second zone. the second zone comprises a portion that surrounds the first zone. each first zone comprises a hydrophilic surface, and each second zone comprises a hydrophobic surface. a first liquid is deposited on the first carrier. the plurality of regions are aligned with a plurality of dies on a second carrier. the dies are transferred from the second carrier to the first carrier. a second liquid is deposited on a substrate, which includes a plurality of bond areas. each die bond area comprises a hydrophilic surface. the dies are transferred from the first carrier to the substrate.

Inventor(s): Veronica A. Strong, Feras Eid, Chien-An Chen, Wenhao Li, Bhaskar Jyoti Krishnatreya, Thomas Sounart, Adel Elsherbini, Kimin Jun, Johanna Swan

CPC Classification: H01L21/6835 ({using temporarily an auxiliary support})

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