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18478770. PROTECTIVE DEBONDING STACK FOR SELECTIVE TRANSFER (INTEL CORPORATION)

From WikiPatents

PROTECTIVE DEBONDING STACK FOR SELECTIVE TRANSFER

Organization Name

INTEL CORPORATION

Inventor(s)

Andrey Vyatskikh of Hillsboro OR US

Feras Eid of Chandler AZ US

Tushar Kanti Talukdar of Wilsonville OR US

Kimin Jun of Portland OR US

Thomas L. Sounart of Chandler AZ US

Jeffery D. Bielefeld of Forest Grove OR US

Grant M. Kloster of Lake Oswego OR US

Carlos Bedoya Arroyave of Portland OR US

Golsa Naderi of Portland OR US

Adel Elsherbini of Chandler AZ US

PROTECTIVE DEBONDING STACK FOR SELECTIVE TRANSFER

This abstract first appeared for US patent application 18478770 titled 'PROTECTIVE DEBONDING STACK FOR SELECTIVE TRANSFER

Original Abstract Submitted

An embodiment discloses a method comprising receiving a substrate comprising a first layer, a second layer over the first layer, and a third layer over the second layer, the third layer comprising a plurality of integrated circuit (IC) components, and applying a laser to ablate portions of the first layer, wherein the second layer protects the third layer from cracking during application of the laser.

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