International business machines corporation (20240429098). MERGED SELF-ALIGNED BACKSIDE CONTACT
MERGED SELF-ALIGNED BACKSIDE CONTACT
Organization Name
international business machines corporation
Inventor(s)
Albert M. Chu of Nashua NH (US)
Ruilong Xie of Niskayuna NY (US)
Brent A. Anderson of Jericho VT (US)
Junli Wang of Slingerlands NY (US)
Jay William Strane of Wappingers Falls NY (US)
David Wolpert of Poughkeepsie NY (US)
MERGED SELF-ALIGNED BACKSIDE CONTACT
This abstract first appeared for US patent application 20240429098 titled 'MERGED SELF-ALIGNED BACKSIDE CONTACT
Original Abstract Submitted
a semiconductor structure with two adjacent semiconductor devices of a plurality of semiconductor devices that have a backside contact that connects two adjacent source/drains of the two adjacent semiconductor devices to a backside power rail. the semiconductor provides the backside contact with a larger bottom contact area with the backside power rail than a combined contact area of the two top surfaces of the backside contact with the two adjacent source/drains.
- International business machines corporation
- Albert M. Chu of Nashua NH (US)
- Ruilong Xie of Niskayuna NY (US)
- Brent A. Anderson of Jericho VT (US)
- Junli Wang of Slingerlands NY (US)
- Jay William Strane of Wappingers Falls NY (US)
- Leon Sigal of Monsey NY (US)
- David Wolpert of Poughkeepsie NY (US)
- H01L21/768
- H01L21/74
- H01L21/8234
- H01L23/528
- H01L23/535
- H01L29/06
- CPC H01L21/76897