18473711. SELECTIVE TRANSFER OF OPTICAL AND OPTO-ELECTRONIC COMPONENTS (Intel Corporation)
SELECTIVE TRANSFER OF OPTICAL AND OPTO-ELECTRONIC COMPONENTS
Organization Name
Inventor(s)
Adel Elsherbini of Chandler AZ US
Han Wui Then of Portland OR US
James E. Jaussi of El Dorado Hills CA US
Ganesh Balamurugan of Hillsboro OR US
Thomas L. Sounart of Chandler AZ US
Johanna Swan of Scottsdale AZ US
Henning Braunisch of Phoenix AZ US
Tushar Kanti Talukdar of Wilsonville OR US
Shawna M. Liff of Scottsdale AZ US
SELECTIVE TRANSFER OF OPTICAL AND OPTO-ELECTRONIC COMPONENTS
This abstract first appeared for US patent application 18473711 titled 'SELECTIVE TRANSFER OF OPTICAL AND OPTO-ELECTRONIC COMPONENTS
Original Abstract Submitted
Methods of selectively transferring integrated circuit (IC) components between substrates, and devices and systems formed using the same, are disclosed herein. In one embodiment, a first substrate with a release layer and a layer of IC components over the release layer is received, and a second substrate with one or more adhesive areas is received. The layer of IC components may include one or more waveguides, ring resonators, drivers, photodetectors, transimpedance amplifiers, and/or electronic integrated circuits. The first substrate is partially bonded to the second substrate, such that a subset of IC components on the first substrate are bonded to the adhesive areas on the second substrate. The first substrate is then separated from the second substrate, and the subset of IC components bonded to the second substrate are separated from the first substrate and remain on the second substrate.
- Intel Corporation
- Adel Elsherbini of Chandler AZ US
- Han Wui Then of Portland OR US
- Feras Eid of Chandler AZ US
- James E. Jaussi of El Dorado Hills CA US
- Ganesh Balamurugan of Hillsboro OR US
- Thomas L. Sounart of Chandler AZ US
- Johanna Swan of Scottsdale AZ US
- Henning Braunisch of Phoenix AZ US
- Tushar Kanti Talukdar of Wilsonville OR US
- Shawna M. Liff of Scottsdale AZ US
- H01L21/762
- G02B6/30
- G02B6/43
- H01L21/67
- H01L21/683
- H01L21/768
- CPC H01L21/76254