Intel corporation (20250006651). SLIT FIDUCIALS FOR INTEGRATED CIRCUIT DEVICE ALIGNMENT
SLIT FIDUCIALS FOR INTEGRATED CIRCUIT DEVICE ALIGNMENT
Organization Name
Inventor(s)
Omkar G. Karhade of Chandler AZ US
Nitin A. Deshpande of Chandler AZ US
Francisco Maya of Portland OR US
Suresh V. Pothukuchi of Chandler AZ US
Arnab Sarkar of Chandler AZ US
Mohit Bhatia of Chandler AZ US
Bhaskar Jyoti Krishnatreya of Hillsboro OR US
SLIT FIDUCIALS FOR INTEGRATED CIRCUIT DEVICE ALIGNMENT
This abstract first appeared for US patent application 20250006651 titled 'SLIT FIDUCIALS FOR INTEGRATED CIRCUIT DEVICE ALIGNMENT
Original Abstract Submitted
an apparatus comprising a first integrated circuit device, the first integrated circuit device comprising a fiducial having a length size greater than a width size of the fiducial, wherein the fiducial comprises at least one first area and at least one second area, wherein the at least one first area is to stop light from a light source and the at least one second area is to pass light from the light source during a determination of an alignment between the first integrated circuit device and a second integrated circuit device.
- Intel corporation
- Omkar G. Karhade of Chandler AZ US
- Nitin A. Deshpande of Chandler AZ US
- Francisco Maya of Portland OR US
- Khant Minn of Chandler AZ US
- Suresh V. Pothukuchi of Chandler AZ US
- Arnab Sarkar of Chandler AZ US
- Mohit Bhatia of Chandler AZ US
- Bhaskar Jyoti Krishnatreya of Hillsboro OR US
- Siyan Dong of Chandler AZ US
- H01L23/544
- H01L23/00
- CPC H01L23/544
