Intel corporation (20250006547). INTEGRATED CIRCUIT STRUCTURES WITH REMOVED SUB-FIN
INTEGRATED CIRCUIT STRUCTURES WITH REMOVED SUB-FIN
Organization Name
Inventor(s)
Angel Aquino Gonzalez of Beaverton OR US
Conor P. Puls of Portland OR US
Mitali China of Portland OR US
INTEGRATED CIRCUIT STRUCTURES WITH REMOVED SUB-FIN
This abstract first appeared for US patent application 20250006547 titled 'INTEGRATED CIRCUIT STRUCTURES WITH REMOVED SUB-FIN
Original Abstract Submitted
integrated circuit structures having removed sub-fins, and methods of fabricating integrated circuit structures having removed sub-fins, are described. for example, an integrated circuit structure includes a channel structure, and a sub-fin isolation structure in a trench beneath the channel structure, wherein there is no residual silicon portion in the trench.