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Intel corporation (20250006434). FERROELECTRIC CAPACITOR WITH INSULATING THIN FILM

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FERROELECTRIC CAPACITOR WITH INSULATING THIN FILM

Organization Name

intel corporation

Inventor(s)

Chia-Ching Lin of Portland OR US

Sou-Chi Chang of Portland OR US

Ashish Verma Penumatcha of Hillsboro OR US

Nazila Haratipour of Hillsboro OR US

Seung Hoon Sung of Portland OR US

Owen Y. Loh of Portland OR US

Jack Kavalieros of Portland OR US

Uygar E. Avci of Portland OR US

Ian A. Young of Portland OR US

FERROELECTRIC CAPACITOR WITH INSULATING THIN FILM

This abstract first appeared for US patent application 20250006434 titled 'FERROELECTRIC CAPACITOR WITH INSULATING THIN FILM

Original Abstract Submitted

described is a ferroelectric-based capacitor that improves reliability of a ferroelectric memory by using low-leakage insulating thin film. in one example, the low-leakage insulating thin film is positioned between a bottom electrode and a ferroelectric oxide. in another example, the low-leakage insulating thin film is positioned between a top electrode and ferroelectric oxide. in yet another example, the low-leakage insulating thin film is positioned in the middle of ferroelectric oxide to reduce the leakage current and improve reliability of the ferroelectric oxide.

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