Applied materials, inc. (20240412947). RADIO-FREQUENCY (RF) MATCHING NETWORK FOR FAST IMPEDANCE TUNING
RADIO-FREQUENCY (RF) MATCHING NETWORK FOR FAST IMPEDANCE TUNING
Organization Name
Inventor(s)
Yue Guo of Redwood City CA (US)
A N M Wasekul Azad of Santa Clara CA (US)
Kartik Ramaswamy of San Jose CA (US)
Nicolas J. Bright of Arlington WA (US)
Yang Yang of San Diego CA (US)
RADIO-FREQUENCY (RF) MATCHING NETWORK FOR FAST IMPEDANCE TUNING
This abstract first appeared for US patent application 20240412947 titled 'RADIO-FREQUENCY (RF) MATCHING NETWORK FOR FAST IMPEDANCE TUNING
Original Abstract Submitted
some embodiments are directed to a tuning circuit. the tuning circuit generally includes: a first impedance coupled between a first terminal and a second terminal of the tuning circuit, wherein the first terminal is coupled to a generator and the second terminal is coupled to a load; a second impedance coupled between the first impedance of the tuning circuit and a reference potential node; and a signal path coupled to the first impedance or the second impedance, the signal path comprising an inductive element and a first switch coupled to the inductive element, wherein a control input of the first switch is coupled to a control input of the tuning circuit configured to receive a control signal associated with a pulsed voltage (pv) waveform.
