METAL INSULATOR METAL CAPACITOR (MIM CAPACITOR)

Organization Name

INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor(s)

Chanro Park of Clifton Park NY (US)

Ruilong Xie of Niskayuna NY (US)

Julien Frougier of Albany NY (US)

Chih-Chao Yang of Glenmont NY (US)

Ashim Dutta of Clifton Park NY (US)

Shravana Kumar Katakam of Lehi UT (US)

METAL INSULATOR METAL CAPACITOR (MIM CAPACITOR)

This abstract first appeared for US patent application 18334430 titled 'METAL INSULATOR METAL CAPACITOR (MIM CAPACITOR)

Original Abstract Submitted

A semiconductor device including a metal insulator metal capacitor (MIM capacitor) within back end of line circuitry, where a bottom electrode of the MIM capacitor includes a plurality of vertical pillars extending up from a bottom layer. A semiconductor device including a metal insulator metal capacitor (MIM capacitor), where a bottom electrode of the MIM capacitor includes a plurality of vertical pillars extending up from a bottom layer. Forming back end of line Mx-1 metal line layer, forming a plurality of Vx-1 via on the Mx-1 metal line layer, forming Mx metal line layer with subtractive patterning on the plurality of the Vx-1 via, forming a plurality of Vx via on the Mx metal line layer with subtractive patterning; and forming a block mask protecting a portion of the semiconductor device.