18215427. CONDITIONING SEMICONDUCTOR PROCESSING SOLUTIONS FOR REUSE (Intel Corporation)
CONDITIONING SEMICONDUCTOR PROCESSING SOLUTIONS FOR REUSE
Organization Name
Inventor(s)
Joseph Bloxham of Laveen AZ (US)
Jeremy D. Ecton of Gilbert AZ (US)
CONDITIONING SEMICONDUCTOR PROCESSING SOLUTIONS FOR REUSE
This abstract first appeared for US patent application 18215427 titled 'CONDITIONING SEMICONDUCTOR PROCESSING SOLUTIONS FOR REUSE
Original Abstract Submitted
Devices, systems, and methods for conditioning a solvent return flow from a photolithographic process used for semiconductor processing are presented. Reuse of materials in semiconductor processing can provide environmental and manufacturing cost advantages. Devices for conditioning a solvent return flow from a photolithographic process and systems for photolithographic processes include a baffle system and a light system. Methods for reusing a solvent from a photolithographic process include passing the solvent through a conditioning device having a baffle system and a light system.