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Category:B24B37/015
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Pages in category "B24B37/015"
The following 5 pages are in this category, out of 5 total.
1
- 18417304. APPARATUS AND METHOD FOR CMP TEMPERATURE CONTROL simplified abstract (Applied Materials, Inc.)
- 18537574. METHOD FOR CMP TEMPERATURE CONTROL simplified abstract (Applied Materials, Inc.)
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- US Patent Application 17824930. APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE simplified abstract
- US Patent Application 18100937. POLISHING PAD AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME simplified abstract
- US Patent Application 18359396. Chemical Mechanical Polishing Apparatus Including a Multi-Zone Platen simplified abstract