US Patent Application 18363833. METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR STRUCTURE simplified abstract

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METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR STRUCTURE

Organization Name

CHANGXIN MEMORY TECHNOLOGIES, INC.

Inventor(s)

Jingwen Lu of Hefei City (CN)

METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR STRUCTURE - A simplified explanation of the abstract

This abstract first appeared for US patent application 18363833 titled 'METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR STRUCTURE

Simplified Explanation

The present disclosure describes a method of manufacturing a semiconductor structure and a semiconductor structure.

  • The method involves starting with an initial structure that includes a substrate and initial word line structures, each containing an initial conductive structure.
  • Isolation trenches are then formed to separate the remaining part of the substrate into multiple independent active area structures. These active area structures cover the first parts of the initial word line structures, while the isolation trenches expose the second parts of the initial word line structures.
  • Finally, part of the second part of the initial word line structure is removed.


Original Abstract Submitted

The present disclosure provides a method of manufacturing a semiconductor structure and a semiconductor structure. The method includes: providing an initial structure, where the initial structure includes a substrate and initial word line structures, and each of the initial word line structures includes an initial conductive structure; forming isolation trenches, where a remaining part of the substrate is isolated by the isolation trenches to form a plurality of active area structures independent of each other, the active area structures cover first parts of the initial word line structures, and the isolation trenches expose second parts of the initial word line structures; and removing part of the second part of the initial word line structure.

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