US Patent Application 18363439. MULTI-LAYERED INSULATING FILM STACK simplified abstract
Contents
MULTI-LAYERED INSULATING FILM STACK
Organization Name
Taiwan Semiconductor Manufacturing Company, Ltd.
Inventor(s)
Chieh-Ping Wang of Taichung (TW)
Ting-Gang Chen of Taipei City (TW)
Bo-Cyuan Lu of New Taipei City (TW)
Tai-Chun Huang of Hsinchu (TW)
MULTI-LAYERED INSULATING FILM STACK - A simplified explanation of the abstract
This abstract first appeared for US patent application 18363439 titled 'MULTI-LAYERED INSULATING FILM STACK
Simplified Explanation
The patent application describes a method for forming a semiconductor device.
- The method involves forming a gate structure over a fin that protrudes above a substrate.
- An opening is then formed in the gate structure.
- A non-conformal first dielectric layer is formed along the sidewalls and bottom of the opening.
- The first dielectric layer has a larger thickness near the upper surface of the gate structure and a smaller thickness near the bottom of the opening.
- A second dielectric layer, made of a different material, is then formed over the first dielectric layer to fill the opening.
Original Abstract Submitted
A method for forming a semiconductor device includes: forming a gate structure over a fin, where the fin protrudes above a substrate; forming an opening in the gate structure; forming a first dielectric layer along sidewalls and a bottom of the opening, where the first dielectric layer is non-conformal, where the first dielectric layer has a first thickness proximate to an upper surface of the gate structure distal from the substrate, and has a second thickness proximate to the bottom of the opening, where the first thickness is larger than the second thickness; and forming a second dielectric layer over the first dielectric layer to fill the opening, where the first dielectric layer is formed of a first dielectric material, and the second dielectric layer is formed of a second dielectric material different from the first dielectric material.
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chieh-Ping Wang of Taichung (TW)
- Ting-Gang Chen of Taipei City (TW)
- Bo-Cyuan Lu of New Taipei City (TW)
- Tai-Chun Huang of Hsinchu (TW)
- Chi On Chui of Hsinchu (TW)
- H01L21/8234
- H01L21/28
- H01L27/088
- H01L29/06
- H01L21/02
- H01L21/311
- H01L21/764
- H01L21/762
- H01L29/66
- H01L29/78