US Patent Application 18358517. SYSTEMS AND METHODS FOR AIR FLOW OPTIMIZATION IN ENVIRONMENT FOR SEMICONDUCTOR DEVICE simplified abstract

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SYSTEMS AND METHODS FOR AIR FLOW OPTIMIZATION IN ENVIRONMENT FOR SEMICONDUCTOR DEVICE

Organization Name

Taiwan Semiconductor Manufacturing Company, Ltd.==Inventor(s)==

[[Category:Yi-Fam Shiu of Miaoli County (TW)]]

[[Category:Cheng-Lung Wu of Miaoli County (TW)]]

[[Category:Yang-Ann Chu of Hsinchu City (TW)]]

[[Category:Hsu-Shui Liu of Taoyuan County (TW)]]

[[Category:Jiun-Rong Pai of Hsinchu County (TW)]]

SYSTEMS AND METHODS FOR AIR FLOW OPTIMIZATION IN ENVIRONMENT FOR SEMICONDUCTOR DEVICE - A simplified explanation of the abstract

This abstract first appeared for US patent application 18358517 titled 'SYSTEMS AND METHODS FOR AIR FLOW OPTIMIZATION IN ENVIRONMENT FOR SEMICONDUCTOR DEVICE

Simplified Explanation

The patent application describes a system that includes a front opening universal pod (FOUP) for holding semiconductor wafers and a load dock with a stage and a receiving portion above the stage.

  • The FOUP is placed on the stage, and there is a fan filter unit (FFU) positioned above the load dock.
  • An air flow optimizer device is located on the receiving portion and under the FFU.
  • The air flow optimizer device has an inlet opening, an outlet opening, and a channel that connects the two.
  • The purpose of the air flow optimizer device is to optimize the airflow within the system, improving the efficiency of the semiconductor wafer handling process.


Original Abstract Submitted

A system comprises a front opening universal pod (FOUP) configured to hold one or more semiconductor wafers and a load dock having a stage and a receiving portion extending above the stage. The FOUP is positioned on the stage. A fan filter unit (FFU) positioned above the load dock. An air flow optimizer device is disposed on the receiving portion and under the FFU. The air flow optimizer device has an inlet opening and an outlet opening and a channel extends between the inlet opening and the outlet opening.

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