US Patent Application 18320876. PIEZOELECTRIC MICROMACHINED PRESSURE TRANSDUCER WITH HIGH SENSITIVITY AND RELATED MANUFACTURING PROCESS simplified abstract

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PIEZOELECTRIC MICROMACHINED PRESSURE TRANSDUCER WITH HIGH SENSITIVITY AND RELATED MANUFACTURING PROCESS

Organization Name

STMICROELECTRONICS S.r.l.

Inventor(s)

Domenico Giusti of Caponago (IT)

Fabio Quaglia of Pizzale (IT)

Marco Ferrera of Concorezzo (IT)

PIEZOELECTRIC MICROMACHINED PRESSURE TRANSDUCER WITH HIGH SENSITIVITY AND RELATED MANUFACTURING PROCESS - A simplified explanation of the abstract

This abstract first appeared for US patent application 18320876 titled 'PIEZOELECTRIC MICROMACHINED PRESSURE TRANSDUCER WITH HIGH SENSITIVITY AND RELATED MANUFACTURING PROCESS

Simplified Explanation

The patent application describes a micromachined pressure transducer that includes a fixed body of semiconductor material and a transduction structure. The transduction structure is suspended on a main cavity and consists of deformable structures and a movable region made of semiconductor material. The deformable structures are mechanically coupled to the fixed body and the movable region.

  • The pressure transducer includes a fixed body of semiconductor material and a transduction structure.
  • The transduction structure is suspended on a main cavity.
  • The transduction structure consists of deformable structures and a movable region made of semiconductor material.
  • The deformable structures are mechanically coupled to the fixed body and the movable region.
  • Each deformable structure includes a support structure of semiconductor material.
  • The support structure has two beams, one superimposed on the other, with ends fixed to the fixed body and the movable region.
  • The deformable structures also include at least one piezoelectric transduction structure, mechanically coupled to the first beam.
  • The piezoelectric transduction structures are electrically controllable.
  • The piezoelectric transduction structures cause deformations in the support structures, resulting in a translation of the movable region along a specific direction.


Original Abstract Submitted

Micromachined pressure transducer including: a fixed body of semiconductor material, which laterally delimits a main cavity; a transduction structure, which is suspended on the main cavity and includes at least a pair of deformable structures and a movable region, which is formed by semiconductor material and is mechanically coupled to the fixed body through the deformable structures. Each deformable structure includes: a support structure of semiconductor material, which includes a first and a second beam, each of which has ends fixed respectively to the fixed body and to the movable region, the first beam being superimposed, at a distance, on the second beam; and at least one piezoelectric transduction structure, mechanically coupled to the first beam. The piezoelectric transduction structures are electrically controllable so that they cause corresponding deformations of the respective support structures and a consequent translation of the movable region along a translation direction.

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