US Patent Application 18319505. ACOUSTIC WAVE DEVICE simplified abstract
Contents
ACOUSTIC WAVE DEVICE
Organization Name
Murata Manufacturing Co., Ltd.
Inventor(s)
Yutaka Kishimoto of Nagaokakyo-shi (JP)
Masashi Omura of Nagaokakyo-shi (JP)
ACOUSTIC WAVE DEVICE - A simplified explanation of the abstract
This abstract first appeared for US patent application 18319505 titled 'ACOUSTIC WAVE DEVICE
Simplified Explanation
The patent application describes an acoustic wave device with specific structural features.
- The device consists of an intermediate film, a piezoelectric film, and a first electrode, all layered on a support substrate.
- In plan view, a void portion overlaps with at least a part of the first electrode on the second main surface of the piezoelectric film.
- A groove portion is present, passing through at least a part of the piezoelectric film but not reaching the void portion.
Original Abstract Submitted
An acoustic wave device includes an intermediate film, a piezoelectric film , and a first electrode, which are laminated in this order on a support substrate. A void portion is provided to overlap at least a part of the first electrode on the side of a second main surface of the piezoelectric film in plan view from the side of a first main surface. A groove portion is also provided to pass through at least a part of the piezoelectric film but not reach the void portion.
