US Patent Application 18301445. PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD simplified abstract

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PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD

Organization Name

CANON KABUSHIKI KAISHA


Inventor(s)

Ryo Ikuta of Tochigi (JP)


Hiroyuki Morimoto of Tochigi (JP)


PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD - A simplified explanation of the abstract

  • This abstract for appeared for US patent application number 18301445 Titled 'PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD'

Simplified Explanation

The abstract describes a processing apparatus that uses laser light to process a workpiece. The apparatus includes a rotation unit that rotates the laser light's intensity distribution around a central rotation axis. There is also a scanning unit that scans the laser light on the workpiece. The control unit reduces any angular or positional shifts of the laser light caused by a misalignment between the rotation axis and the laser light's barycentric line entering the rotation unit.


Original Abstract Submitted

A processing apparatus that processes a workpiece by irradiating the workpiece with laser light, the apparatus including a rotation unit configured to rotate with a rotation axis as a center, thereby rotating an intensity distribution of the laser light emitted therefrom with the rotation axis as a center, a scanning unit configured to scan the laser light applied to the workpiece, and a control unit configured to irradiate the workpiece with the laser light while reducing at least one of an angular shift and a positional shift of the laser light entering the workpiece, which occur due to a shift between the rotation axis and a barycentric line of the laser light entering the rotation unit.