US Patent Application 17813409. SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF simplified abstract
Contents
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
Organization Name
CHANGXIN MEMORY TECHNOLOGIES, INC.
Inventor(s)
Youming Liu of Hefei City (CN)
Deyuan Xiao of Hefei City (CN)
Guangsu Shao of Hefei City (CN)
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF - A simplified explanation of the abstract
This abstract first appeared for US patent application 17813409 titled 'SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
Simplified Explanation
- The patent application describes a semiconductor structure and a manufacturing method in the field of semiconductors. - The semiconductor structure includes a substrate and a first stacked structure that contains a memory cell array. - The structure also includes a plurality of word lines (WLs) arranged at intervals and extending along a first direction. - A plurality of bit lines (BLs) are also present, arranged at intervals and extending along a second direction. - One end of each BL forms a step in the first direction, and each BL has a groove on the surface of the step. - The second direction and the first direction intersect each other. - A plurality of BL plugs are arranged at intervals and extend along the first direction. - One end of each BL plug is placed in the groove of one of the BLs.
Original Abstract Submitted
The present disclosure provides a semiconductor structure and a manufacturing method thereof, and relates to the technical field of semiconductors. The semiconductor structure includes: a substrate, a first stacked structure is disposed on the substrate, and includes a memory cell array; a plurality of word lines (WLs), arranged at intervals and extending along a first direction; a plurality of bit lines (BLs), arranged at intervals and extending along a second direction, one end of each of the plurality of BLs away from the memory cell array forms a step in the first direction, each BL is provided with a groove on a surface of the step, and the second direction and the first direction cross each other; and a plurality of BL plugs, arranged at intervals and extending along the first direction, one end of each BL plug is correspondingly disposed in the groove of one of the BLs.
