US Patent Application 17804184. THREE-DIMENSIONAL MEMORY DEVICE CONTAINING DUAL-DEPTH DRAIN-SELECT-LEVEL ISOLATION STRUCTURES AND METHODS FOR FORMING THE SAME simplified abstract
THREE-DIMENSIONAL MEMORY DEVICE CONTAINING DUAL-DEPTH DRAIN-SELECT-LEVEL ISOLATION STRUCTURES AND METHODS FOR FORMING THE SAME
Organization Name
Inventor(s)
Akihiro Tobioka of Nagoya (JP)
THREE-DIMENSIONAL MEMORY DEVICE CONTAINING DUAL-DEPTH DRAIN-SELECT-LEVEL ISOLATION STRUCTURES AND METHODS FOR FORMING THE SAME - A simplified explanation of the abstract
This abstract first appeared for US patent application 17804184 titled 'THREE-DIMENSIONAL MEMORY DEVICE CONTAINING DUAL-DEPTH DRAIN-SELECT-LEVEL ISOLATION STRUCTURES AND METHODS FOR FORMING THE SAME
Simplified Explanation
The patent application describes a three-dimensional memory device that consists of alternating layers of insulating and electrically conductive materials.
- The device has memory openings that extend vertically through the alternating layers.
- Within each memory opening, there are memory opening fill structures.
- Composite drain-select-level isolation structures divide each drain-select-level electrically conductive layer into multiple electrically conductive strips.
- Each drain-select-level isolation structure includes a first isolation material portion that extends vertically through each drain-select-level electrically conductive layer.
- Additionally, there are second isolation material portions that also extend vertically through each drain-select-level electrically conductive layer and a topmost dummy electrically conductive layer.
Original Abstract Submitted
A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers, memory openings vertically extending through the alternating stack, and memory opening fill structures located within a respective one of the memory openings. Composite drain-select-level isolation structures divide each drain-select-level electrically conductive layer into a respective plurality of electrically conductive strips. Each drain-select-level isolation structure includes a respective first drain-select-level isolation material portion vertically extending through each drain-select-level electrically conductive layers and a respective set of second drain-select-level isolation material portions vertically extending through each of the drain-select-level electrically conductive layers and at least a topmost dummy electrically conductive layer that underlies the drain-select-level electrically conductive layers.