TOKYO ELECTRON LIMITED Patent Application Trends in 2024
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TOKYO ELECTRON LIMITED Patent Filing Activity
TOKYO ELECTRON LIMITED patent applications in 2024
Top 10 Technology Areas
- H01J2237/334 (No explanation available)
- Count: 39 patents
- Example: 20240234097. ETCHING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
- H01J37/32449 (No explanation available)
- Count: 38 patents
- Example: 20240229238. FILM FORMING DEVICE AND FILM FORMING METHOD simplified abstract (TOKYO ELECTRON LIMITED)
- H01J37/32715 (No explanation available)
- H01J37/32091 (No explanation available)
- H01J37/32724 (No explanation available)
- H01J2237/332 (No explanation available)
- H01L21/31116 (No explanation available)
- H01J37/32568 (No explanation available)
- H01J37/3244 (No explanation available)
- Count: 20 patents
- Example: 20240234097. ETCHING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
- H01L21/31144 (No explanation available)
Emerging Technology Areas
- H05H1/4652 (No explanation available)
- Count: 1 patents
- Example: 20240049379. PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
- H05H1/46 (No explanation available)
- Count: 1 patents
- Example: 20240049379. PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
- H01L21/76895 (No explanation available)
- H01L21/76843 (No explanation available)
- H01L23/5226 (No explanation available)
- H01L2224/8013 (No explanation available)
- Count: 1 patents
- Example: 20240047257. BONDING SYSTEM simplified abstract (Tokyo Electron Limited)
- H01L21/67126 (No explanation available)
- B08B3/14 (No explanation available)
- H01J2237/024 (No explanation available)
- Count: 1 patents
- Example: 20240047184. PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
- G06T15/00 (No explanation available)
Top Inventors
- H. Jim Fulford of Albany NY (US) (13 patents)
- Mark I. Gardner of Albany NY (US) (13 patents)
- Yohei YAMASHITA (9 patents)
- Eric Chih-Fang Liu of Albany NY (US) (9 patents)
- Sergey Voronin of Albany NY (US) (8 patents)
- Taro IKEDA (8 patents)
- Maju TOMURA (8 patents)
- Henan Zhang of Albany NY (US) (7 patents)
- Kazushi KANEKO (6 patents)
- Kandabara Tapily of Albany NY (US) (6 patents)
Patent Categories
Geographical Distribution of Inventors
Geographical Distribution of US Inventors
Categories:
- TOKYO ELECTRON LIMITED
- Companies
- CPC B05C11/11
- CPC B05C11/1039
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- CPC H01L21/677
- CPC H01L21/68707
- CPC C23C16/45536
- CPC C23C16/45544
- CPC C23C16/45565
- CPC C23C16/505
- CPC C23C16/52
- CPC H01J37/32449
- CPC H01J2237/3321
- CPC G01J3/443
- CPC G01J3/0205
- CPC G03F7/162
- CPC H01L21/67178
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- CPC H01L21/67745
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