International business machines corporation (20250089329). TAPERED INNER SPACER

TAPERED INNER SPACER

Organization Name

international business machines corporation

Inventor(s)

Reinaldo Vega of Mahopac NY (US)

Jingyun Zhang of Albany NY (US)

TAPERED INNER SPACER

This abstract first appeared for US patent application 20250089329 titled 'TAPERED INNER SPACER

Original Abstract Submitted

a transistor includes one or more tapered inner spacers. the tapered inner spacer may include a base region that extends or protrudes beyond a plane that is coplanar with a first sidewall of the gate. the base region(s) may reduce the gate length of the gate adjacent to the base region. when two base regions are associated with the same gate, the two base regions may merge and may be between and/or isolate the gate from the underlying substrate. the tapered inner spacers may result in reduced parasitic capacitances between gate and the substrate and/or between the gate and adjacent source/drain region(s), and/or may reduce current leakage from the gate into the substrate or other underlying structure.