Plasma Technology Patent Application Trends 2024
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Contents
- 1 Plasma Technology Patent Application Filing Activity
- 2 Plasma Technology patent applications in 2024
- 3 Top Technology Areas in Plasma Technology
- 4 Top Companies in Plasma Technology
- 4.1 Tokyo Electron Limited
- 4.2 Applied Materials, Inc.
- 4.3 Lam Research Corporation
- 4.4 Hitachi High-Tech Corporation
- 4.5 TOKYO ELECTRON LIMITED
- 4.6 HITACHI HIGH-TECH CORPORATION
- 4.7 SAMSUNG ELECTRONICS CO., LTD.
- 4.8 DISCO CORPORATION
- 4.9 Advanced Energy Industries, Inc.
- 4.10 Beijing E-Town Semiconductor Technology Co., Ltd.
- 5 New Companies in Plasma Technology (Last Month)
- 6 Emerging Technology Areas in Plasma Technology
- 7 Top Companies in Emerging Plasma Technology Technologies
- 8 Top Inventors in Plasma Technology
- 8.1 Kartik RAMASWAMY of San Jose CA (US)
- 8.2 Yue GUO of Redwood City CA (US)
- 8.3 Taro IKEDA
- 8.4 Chishio KOSHIMIZU
- 8.5 Sergey Voronin of Albany NY (US)
- 8.6 Yang YANG of San Diego CA (US)
- 8.7 Kazushi KANEKO
- 8.8 Eiki KAMATA
- 8.9 Peter Lowell George Ventzek of Austin TX (US)
- 8.10 Maju TOMURA
- 8.11 Masaki HIRAYAMA
- 8.12 Barton Lane of Austin TX (US)
- 8.13 Blaze Messer of Albany NY (US)
- 8.14 Yan Chen of Fremont CA (US)
- 8.15 Joel Ng of Fremont CA (US)
- 8.16 Ashawaraya Shalini of Fremont CA (US)
- 8.17 Ying Zhu of Fremont CA (US)
- 8.18 Merritt Funk of Austin TX (US)
- 8.19 Keren J. KANARIK of Los Altos CA (US)
- 8.20 Samantha SiamHwa TAN of Newark CA (US)
- 8.21 Yang PAN of Los Altos CA (US)
- 8.22 Jeffrey MARKS of Saratoga CA (US)
- 8.23 Linying CUI of Cupertino CA (US)
- 8.24 James ROGERS of Los Gatos CA (US)
- 8.25 Rajinder DHINDSA of Pleasanton CA (US)
- 8.26 Koki MUKAIYAMA
- 8.27 Yoshihide KIHARA
- 8.28 Shinji HIMORI
- 8.29 A N M Wasekul AZAD of Santa Clara CA (US)
- 8.30 Atsushi TAKAHASHI
- 8.31 Kazuki MOYAMA
- 8.32 Mitsunori Ohata
- 8.33 Gen TAMAMUSHI
- 8.34 Hiroyuki MATSUURA
- 8.35 Satoru KAWAKAMI
- 8.36 Shota YOSHIMURA
- 8.37 Jianping Zhao of Austin TX (US)
- 8.38 Qiang Wang of Austin TX (US)
- 8.39 Shin YAMAGUCHI
- 8.40 Makoto KATO
- 8.41 Hajime TAMURA
- 8.42 Kazuya NAGASEKI
- 8.43 Satoru TERUUCHI
- 8.44 Yasuharu SASAKI
- 8.45 Naoki MATSUMOTO
- 8.46 Da Song of Albany NY (US)
- 8.47 Shin MATSUURA
- 8.48 Chelsea DuBose of Austin TX (US)
- 8.49 Justin Moses of Austin TX (US)
- 8.50 Hiroyuki MIYASHITA
- 9 Top Collaborations in Plasma Technology
- 10 Top US States for Plasma Technology Inventors
- 11 Top Cities for Plasma Technology Inventors
Plasma Technology Patent Application Filing Activity
Plasma Technology patent applications in 2024
Top Technology Areas in Plasma Technology
Top CPC Codes
- H01J2237/334 (No explanation available)
- Count: 80 patents
- Example: 20240234097. ETCHING METHOD AND PLASMA PROCESSING APPARATUS (Tokyo Electron Limited)
- H01J37/32715 (No explanation available)
- Count: 66 patents
- Example: 20240234102. PLASMA PROCESSING SYSTEM AND EDGE RING REPLACEMENT METHOD (Tokyo Electron Limited)
- H01J37/32449 (No explanation available)
- Count: 49 patents
- Example: 20240234113. PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS (Tokyo Electron Limited)
- H01J37/32183 (No explanation available)
- Count: 45 patents
- Example: 20240234092. FREQUENCY-VARIABLE POWER SUPPLY AND PLASMA PROCESSING APPARATUS (Tokyo Electron Limited)
- H01J37/32568 (No explanation available)
- Count: 39 patents
- Example: 20240234104. MULTI-SECTIONAL PLASMA CONFINEMENT RING STRUCTURE (Lam Research Corporation)
- H01J37/3244 (No explanation available)
- H01J37/32091 (No explanation available)
- Count: 35 patents
- Example: 20240234087. PULSED VOLTAGE SOURCE FOR PLASMA PROCESSING APPLICATIONS (Applied Materials, Inc.)
- H01J37/32724 (No explanation available)
- Count: 34 patents
- Example: 20240234099. FORMING METHOD OF COMPONENT AND PLASMA PROCESSING APPARATUS (Tokyo Electron Limited)
- H01J37/32174 (No explanation available)
- Count: 33 patents
- Example: 20240258070. PLASMA UNIFORMITY CONTROL SYSTEM AND METHODS (Applied Materials, Inc.)
- H01J37/32642 (No explanation available)
- Count: 32 patents
- Example: 20240234102. PLASMA PROCESSING SYSTEM AND EDGE RING REPLACEMENT METHOD (Tokyo Electron Limited)
Top Companies in Plasma Technology
Tokyo Electron Limited
- Number of Plasma Technology patents: 164
- Top CPC codes:
- H01J2237/334 (No explanation available): 39 patents
- H01J37/32715 (No explanation available): 39 patents
- H01J37/32449 (No explanation available): 29 patents
- Recent patents:
Applied Materials, Inc.
- Number of Plasma Technology patents: 36
- Top CPC codes:
- H01J37/32183 (No explanation available): 11 patents
- H01J37/32128 (No explanation available): 10 patents
- H01J2237/3341 (No explanation available): 8 patents
- Recent patents:
- 20240321610. SENSORS AND SYSTEM FOR IN-SITU EDGE RING EROSION MONITOR (Applied Materials, Inc.) (20240926)
- 20240030002. PLASMA PROCESSING ASSEMBLY USING PULSED-VOLTAGE AND RADIO-FREQUENCY POWER (Applied Materials, Inc.) (20240125)
- 20240047246. ADVANCED TEMPERATURE CONTROL FOR WAFER CARRIER IN PLASMA PROCESSING CHAMBER (Applied Materials, Inc.) (20240208)
Lam Research Corporation
- Number of Plasma Technology patents: 21
- Top CPC codes:
- H01L21/67069 (No explanation available): 7 patents
- H01L21/6833 (No explanation available): 7 patents
- H01L21/67109 (No explanation available): 5 patents
- Recent patents:
- 20240363311. RF POWER COMPENSATION TO REDUCE DEPOSITION OR ETCH RATE CHANGES IN RESPONSE TO SUBSTRATE BULK RESISTIVITY VARIATIONS (Lam Research Corporation) (20241031)
- 20240218509. MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE COATING WITH INTERMITTENT RESTORATION PLASMA (Lam Research Corporation) (20240704)
- 20240322781. Multiple-Output Radiofrequency Matching Module and Associated Methods (Lam Research Corporation) (20240926)
Hitachi High-Tech Corporation
- Number of Plasma Technology patents: 17
- Top CPC codes:
- H01J2237/334 (No explanation available): 4 patents
- H01J37/32174 (No explanation available): 3 patents
- H01J37/32715 (No explanation available): 3 patents
- Recent patents:
- 20240047181. PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD (Hitachi High-Tech Corporation) (20240208)
- 20240047239. PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD (Hitachi High-Tech Corporation) (20240208)
- 20240047258. PLASMA PROCESSING APPARATUS (Hitachi High-Tech Corporation) (20240208)
TOKYO ELECTRON LIMITED
- Number of Plasma Technology patents: 14
- Top CPC codes:
- H01J2237/334 (No explanation available): 3 patents
- H01J37/32247 (No explanation available): 3 patents
- H01J37/32513 (No explanation available): 2 patents
- Recent patents:
- 20240331977. PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING METHOD (TOKYO ELECTRON LIMITED) (20241003)
- 20240030008. PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD (TOKYO ELECTRON LIMITED) (20240125)
- 20240030015. PLASMA PROCESSING APPARATUS AND PLASMA STATE ESTIMATION METHOD (TOKYO ELECTRON LIMITED) (20240125)
HITACHI HIGH-TECH CORPORATION
- Number of Plasma Technology patents: 11
- Top CPC codes:
- H01J2237/334 (No explanation available): 6 patents
- H01J37/32449 (No explanation available): 3 patents
- H01J37/32972 (No explanation available): 3 patents
- Recent patents:
SAMSUNG ELECTRONICS CO., LTD.
- Number of Plasma Technology patents: 8
- Top CPC codes:
- H01J2237/334 (No explanation available): 4 patents
- H01J37/3244 (No explanation available): 3 patents
- H01J37/32642 (No explanation available): 3 patents
- Recent patents:
- 20240212992. PLASMA PROCESSING APPARATUS AND METHOD (SAMSUNG ELECTRONICS CO., LTD.) (20240627)
- 20240096649. SEMICONDUCTOR PROCESS SYSTEM AND GAS TREATMENT METHOD (SAMSUNG ELECTRONICS CO., LTD.) (20240321)
- 20240038536. PLASMA PROCESSING APPARATUS, WAFER TO WAFER BONDING SYSTEM AND WAFER TO WAFER BONDING METHOD (SAMSUNG ELECTRONICS CO., LTD.) (20240201)
DISCO CORPORATION
- Number of Plasma Technology patents: 7
- Top CPC codes:
- H01L21/304 (No explanation available): 3 patents
- H01L21/3065 (No explanation available): 3 patents
- H01L24/80 (No explanation available): 2 patents
- Recent patents:
Advanced Energy Industries, Inc.
- Number of Plasma Technology patents: 7
- Top CPC codes:
- H01J37/32174 (No explanation available): 2 patents
- H01J37/32935 (No explanation available): 2 patents
- H01L21/67069 (No explanation available): 2 patents
- Recent patents:
- 20240071721. SYSTEM, METHOD, AND APPARATUS FOR CONTROLLING ION ENERGY DISTRIBUTION IN PLASMA PROCESSING SYSTEMS (Advanced Energy Industries, Inc.) (20240229)
- 20240194452. BIAS SUPPLY WITH RESONANT SWITCHING (Advanced Energy Industries, Inc.) (20240613)
- 20240030001. BIAS SUPPLY WITH A SINGLE CONTROLLED SWITCH (Advanced Energy Industries, Inc.) (20240125)
Beijing E-Town Semiconductor Technology Co., Ltd.
- Number of Plasma Technology patents: 6
- Top CPC codes:
- H01J37/32119 (No explanation available): 3 patents
- H01J2237/334 (No explanation available): 2 patents
- H01L21/6833 (No explanation available): 2 patents
- Recent patents:
- 20240055242. Workpiece Processing Apparatus with Thermal Processing Systems (Beijing E-Town Semiconductor Technology Co., Ltd.) (20240215)
- 20240096680. ELECTROSTATIC CHUCK ASSEMBLY FOR PLASMA PROCESSING APPARATUS (Beijing E-Town Semiconductor Technology Co., Ltd.) (20240321)
- 20240071754. Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Processing (Beijing E-Town Semiconductor Technology Co., Ltd.) (20240229)
New Companies in Plasma Technology (Last Month)
No new companies detected in the last month.
Emerging Technology Areas in Plasma Technology
- H01L21/67063 (No explanation available)
- Count: 1 patents
- Example: 20240047258. PLASMA PROCESSING APPARATUS (Hitachi High-Tech Corporation)
- C23C4/04 (No explanation available)
- G03F7/70633 (No explanation available)
- Count: 1 patents
- Example: 20240030073. ETCH MONITORING AND PERFORMING (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)
- H01J2237/24578 (No explanation available)
- Count: 1 patents
- Example: 20240030015. PLASMA PROCESSING APPARATUS AND PLASMA STATE ESTIMATION METHOD (TOKYO ELECTRON LIMITED)
- G05B15/02 (No explanation available)
- Count: 1 patents
- Example: 20240030015. PLASMA PROCESSING APPARATUS AND PLASMA STATE ESTIMATION METHOD (TOKYO ELECTRON LIMITED)
- G01N25/72 (No explanation available)
- Count: 1 patents
- Example: 20240030012. DETECTION METHOD AND PLASMA PROCESSING APPARATUS (Tokyo Electron Limited)
- G01M3/002 (No explanation available)
- Count: 1 patents
- Example: 20240030012. DETECTION METHOD AND PLASMA PROCESSING APPARATUS (Tokyo Electron Limited)
- H01J2237/3342 (No explanation available)
- Count: 1 patents
- Example: 20240030010. ETCHING METHOD AND PLASMA PROCESSING APPARATUS (Tokyo Electron Limited)
- H05B6/62 (No explanation available)
- Count: 1 patents
- Example: 20240030009. PLASMA PROCESSING APPARATUS AND TEMPERATURE CONTROLLING METHOD (Tokyo Electron Limited)
- H05B6/54 (No explanation available)
- Count: 1 patents
- Example: 20240030009. PLASMA PROCESSING APPARATUS AND TEMPERATURE CONTROLLING METHOD (Tokyo Electron Limited)
Top Companies in Emerging Plasma Technology Technologies
- Tokyo Electron Limited: 5 patents
- TOKYO ELECTRON LIMITED: 2 patents
- Hitachi High-Tech Corporation: 1 patents
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.: 1 patents
- TOCALO Co., Ltd.: 1 patents
Top Inventors in Plasma Technology
Kartik RAMASWAMY of San Jose CA (US)
- Number of Plasma Technology patents: 13
- Top companies:
- Applied Materials, Inc.: 13 patents
- Recent patents:
- 20240194447. LEARNING BASED TUNING IN A RADIO FREQUENCY PLASMA PROCESSING CHAMBER (Applied Materials, Inc.) (20240613)
- 20240152114. RADIO FREQUENCY IMPEDANCE MATCHING NETWORK WITH FLEXIBLE TUNING ALGORITHMS (Applied Materials, Inc.) (20240509)
- 20240030002. PLASMA PROCESSING ASSEMBLY USING PULSED-VOLTAGE AND RADIO-FREQUENCY POWER (Applied Materials, Inc.) (20240125)
Yue GUO of Redwood City CA (US)
- Number of Plasma Technology patents: 11
- Top companies:
- Applied Materials, Inc.: 11 patents
- Recent patents:
- 20240194447. LEARNING BASED TUNING IN A RADIO FREQUENCY PLASMA PROCESSING CHAMBER (Applied Materials, Inc.) (20240613)
- 20240152114. RADIO FREQUENCY IMPEDANCE MATCHING NETWORK WITH FLEXIBLE TUNING ALGORITHMS (Applied Materials, Inc.) (20240509)
- 20240030002. PLASMA PROCESSING ASSEMBLY USING PULSED-VOLTAGE AND RADIO-FREQUENCY POWER (Applied Materials, Inc.) (20240125)
Taro IKEDA
- Number of Plasma Technology patents: 11
- Top companies:
- Tokyo Electron Limited: 9 patents
- TOKYO ELECTRON LIMITED: 2 patents
- Recent patents:
Chishio KOSHIMIZU
- Number of Plasma Technology patents: 10
- Top companies:
- Tokyo Electron Limited: 10 patents
- Recent patents:
Sergey Voronin of Albany NY (US)
- Number of Plasma Technology patents: 8
- Top companies:
- Tokyo Electron Limited: 8 patents
- Recent patents:
- 20240094056. Optical Emission Spectroscopy for Advanced Process Characterization (Tokyo Electron Limited) (20240321)
- 20240096600. Substrate Bombardment with Ions having Targeted Mass using Pulsed Bias Phase Control (Tokyo Electron Limited) (20240321)
- 20240331979. Apparatus and Methods for Plasma Processing (Tokyo Electron Limited) (20241003)
Yang YANG of San Diego CA (US)
- Number of Plasma Technology patents: 8
- Top companies:
- Applied Materials, Inc.: 8 patents
- Recent patents:
- 20240177969. SOLID-STATE SWITCH BASED HIGH-SPEED PULSER WITH PLASMA IEDF MODIFICATION CAPABILITY THROUGH MULTILEVEL OUTPUT FUNCTIONALITY (Applied Materials, Inc.) (20240530)
- 20240194447. LEARNING BASED TUNING IN A RADIO FREQUENCY PLASMA PROCESSING CHAMBER (Applied Materials, Inc.) (20240613)
- 20240152114. RADIO FREQUENCY IMPEDANCE MATCHING NETWORK WITH FLEXIBLE TUNING ALGORITHMS (Applied Materials, Inc.) (20240509)
Kazushi KANEKO
- Number of Plasma Technology patents: 8
- Top companies:
- Tokyo Electron Limited: 5 patents
- TOKYO ELECTRON LIMITED: 3 patents
- Recent patents:
- 20240203692. PLASMA PROCESSING APPARATUS AND PLASMA CONTROL METHOD (Tokyo Electron Limited) (20240620)
- 20240371603. PLASMA PROCESSING APPARATUS, ANALYSIS APPARATUS, PLASMA PROCESSING METHOD, ANALYSIS METHOD, AND STORAGE MEDIUM (Tokyo Electron Limited) (20241107)
- 20240136154. FREQUENCY-VARIABLE POWER SUPPLY AND PLASMA PROCESSING APPARATUS (Tokyo Electron Limited) (20240425)
Eiki KAMATA
- Number of Plasma Technology patents: 8
- Top companies:
- TOKYO ELECTRON LIMITED: 4 patents
- Tokyo Electron Limited: 4 patents
- Recent patents:
- 20240170260. PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING METHOD (TOKYO ELECTRON LIMITED) (20240523)
- 20240030008. PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD (TOKYO ELECTRON LIMITED) (20240125)
- 20240030015. PLASMA PROCESSING APPARATUS AND PLASMA STATE ESTIMATION METHOD (TOKYO ELECTRON LIMITED) (20240125)
Peter Lowell George Ventzek of Austin TX (US)
- Number of Plasma Technology patents: 8
- Top companies:
- Tokyo Electron Limited: 8 patents
- Recent patents:
Maju TOMURA
- Number of Plasma Technology patents: 7
- Top companies:
- Tokyo Electron Limited: 7 patents
- Recent patents:
Masaki HIRAYAMA
- Number of Plasma Technology patents: 7
- Top companies:
- Tokyo Electron Limited: 6 patents
- TOKYO ELECTRON LIMITED: 1 patents
- Recent patents:
Barton Lane of Austin TX (US)
- Number of Plasma Technology patents: 6
- Top companies:
- Tokyo Electron Limited: 6 patents
- Recent patents:
Blaze Messer of Albany NY (US)
- Number of Plasma Technology patents: 5
- Top companies:
- Tokyo Electron Limited: 5 patents
- Recent patents:
- 20240133742. Time-Resolved OES Data Collection (Tokyo Electron Limited) (20240425)
- 20240136164. Method for OES Data Collection and Endpoint Detection (Tokyo Electron Limited) (20240425)
- 20240094056. Optical Emission Spectroscopy for Advanced Process Characterization (Tokyo Electron Limited) (20240321)
Yan Chen of Fremont CA (US)
- Number of Plasma Technology patents: 5
- Top companies:
- Tokyo Electron Limited: 5 patents
- Recent patents:
- 20240133742. Time-Resolved OES Data Collection (Tokyo Electron Limited) (20240425)
- 20240136164. Method for OES Data Collection and Endpoint Detection (Tokyo Electron Limited) (20240425)
- 20240094056. Optical Emission Spectroscopy for Advanced Process Characterization (Tokyo Electron Limited) (20240321)
Joel Ng of Fremont CA (US)
- Number of Plasma Technology patents: 5
- Top companies:
- Tokyo Electron Limited: 5 patents
- Recent patents:
- 20240133742. Time-Resolved OES Data Collection (Tokyo Electron Limited) (20240425)
- 20240136164. Method for OES Data Collection and Endpoint Detection (Tokyo Electron Limited) (20240425)
- 20240094056. Optical Emission Spectroscopy for Advanced Process Characterization (Tokyo Electron Limited) (20240321)
Ashawaraya Shalini of Fremont CA (US)
- Number of Plasma Technology patents: 5
- Top companies:
- Tokyo Electron Limited: 5 patents
- Recent patents:
- 20240133742. Time-Resolved OES Data Collection (Tokyo Electron Limited) (20240425)
- 20240136164. Method for OES Data Collection and Endpoint Detection (Tokyo Electron Limited) (20240425)
- 20240094056. Optical Emission Spectroscopy for Advanced Process Characterization (Tokyo Electron Limited) (20240321)
Ying Zhu of Fremont CA (US)
- Number of Plasma Technology patents: 5
- Top companies:
- Tokyo Electron Limited: 5 patents
- Recent patents:
- 20240133742. Time-Resolved OES Data Collection (Tokyo Electron Limited) (20240425)
- 20240136164. Method for OES Data Collection and Endpoint Detection (Tokyo Electron Limited) (20240425)
- 20240094056. Optical Emission Spectroscopy for Advanced Process Characterization (Tokyo Electron Limited) (20240321)
Merritt Funk of Austin TX (US)
- Number of Plasma Technology patents: 5
- Top companies:
- Tokyo Electron Limited: 5 patents
- Recent patents:
Keren J. KANARIK of Los Altos CA (US)
- Number of Plasma Technology patents: 5
- Top companies:
- Lam Research Corporation: 5 patents
- Recent patents:
- 20240203759. PLASMA ETCHING CHEMISTRIES OF HIGH ASPECT RATIO FEATURES IN DIELECTRICS (Lam Research Corporation) (20240620)
- 20240203760. PLASMA ETCHING CHEMISTRIES OF HIGH ASPECT RATIO FEATURES IN DIELECTRICS (Lam Research Corporation) (20240620)
- 20240178014. PLASMA ETCHING CHEMISTRIES OF HIGH ASPECT RATIO FEATURES IN DIELECTRICS (Lam Research Corporation) (20240530)
Samantha SiamHwa TAN of Newark CA (US)
- Number of Plasma Technology patents: 5
- Top companies:
- Lam Research Corporation: 5 patents
- Recent patents:
- 20240203759. PLASMA ETCHING CHEMISTRIES OF HIGH ASPECT RATIO FEATURES IN DIELECTRICS (Lam Research Corporation) (20240620)
- 20240203760. PLASMA ETCHING CHEMISTRIES OF HIGH ASPECT RATIO FEATURES IN DIELECTRICS (Lam Research Corporation) (20240620)
- 20240178014. PLASMA ETCHING CHEMISTRIES OF HIGH ASPECT RATIO FEATURES IN DIELECTRICS (Lam Research Corporation) (20240530)
Yang PAN of Los Altos CA (US)
- Number of Plasma Technology patents: 5
- Top companies:
- Lam Research Corporation: 5 patents
- Recent patents:
- 20240203759. PLASMA ETCHING CHEMISTRIES OF HIGH ASPECT RATIO FEATURES IN DIELECTRICS (Lam Research Corporation) (20240620)
- 20240203760. PLASMA ETCHING CHEMISTRIES OF HIGH ASPECT RATIO FEATURES IN DIELECTRICS (Lam Research Corporation) (20240620)
- 20240178014. PLASMA ETCHING CHEMISTRIES OF HIGH ASPECT RATIO FEATURES IN DIELECTRICS (Lam Research Corporation) (20240530)
Jeffrey MARKS of Saratoga CA (US)
- Number of Plasma Technology patents: 5
- Top companies:
- Lam Research Corporation: 5 patents
- Recent patents:
- 20240203759. PLASMA ETCHING CHEMISTRIES OF HIGH ASPECT RATIO FEATURES IN DIELECTRICS (Lam Research Corporation) (20240620)
- 20240203760. PLASMA ETCHING CHEMISTRIES OF HIGH ASPECT RATIO FEATURES IN DIELECTRICS (Lam Research Corporation) (20240620)
- 20240178014. PLASMA ETCHING CHEMISTRIES OF HIGH ASPECT RATIO FEATURES IN DIELECTRICS (Lam Research Corporation) (20240530)
Linying CUI of Cupertino CA (US)
- Number of Plasma Technology patents: 5
- Top companies:
- Applied Materials, Inc.: 5 patents
- Recent patents:
- 20240194446. CHAMBER IMPEDANCE MANAGEMENT IN A PROCESSING CHAMBER (Applied Materials, Inc.) (20240613)
- 20240153741. MULTI-SHAPE VOLTAGE PULSE TRAINS FOR UNIFORMITY AND ETCH PROFILE TUNING (Applied Materials, Inc.) (20240509)
- 20240030002. PLASMA PROCESSING ASSEMBLY USING PULSED-VOLTAGE AND RADIO-FREQUENCY POWER (Applied Materials, Inc.) (20240125)
James ROGERS of Los Gatos CA (US)
- Number of Plasma Technology patents: 5
- Top companies:
- Applied Materials, Inc.: 5 patents
- Recent patents:
- 20240194446. CHAMBER IMPEDANCE MANAGEMENT IN A PROCESSING CHAMBER (Applied Materials, Inc.) (20240613)
- 20240153741. MULTI-SHAPE VOLTAGE PULSE TRAINS FOR UNIFORMITY AND ETCH PROFILE TUNING (Applied Materials, Inc.) (20240509)
- 20240030002. PLASMA PROCESSING ASSEMBLY USING PULSED-VOLTAGE AND RADIO-FREQUENCY POWER (Applied Materials, Inc.) (20240125)
Rajinder DHINDSA of Pleasanton CA (US)
- Number of Plasma Technology patents: 5
- Top companies:
- Applied Materials, Inc.: 5 patents
- Recent patents:
- 20240153741. MULTI-SHAPE VOLTAGE PULSE TRAINS FOR UNIFORMITY AND ETCH PROFILE TUNING (Applied Materials, Inc.) (20240509)
- 20240321610. SENSORS AND SYSTEM FOR IN-SITU EDGE RING EROSION MONITOR (Applied Materials, Inc.) (20240926)
- 20240030002. PLASMA PROCESSING ASSEMBLY USING PULSED-VOLTAGE AND RADIO-FREQUENCY POWER (Applied Materials, Inc.) (20240125)
Koki MUKAIYAMA
- Number of Plasma Technology patents: 5
- Top companies:
- Tokyo Electron Limited: 5 patents
- Recent patents:
Yoshihide KIHARA
- Number of Plasma Technology patents: 5
- Top companies:
- Tokyo Electron Limited: 5 patents
- Recent patents:
Shinji HIMORI
- Number of Plasma Technology patents: 5
- Top companies:
- Tokyo Electron Limited: 5 patents
- Recent patents:
- 20240096608. PLASMA MONITORING SYSTEM, PLASMA MONITORING METHOD, AND MONITORING DEVICE (Tokyo Electron Limited) (20240321)
- 20240068921. PARTICLE MONITORING SYSTEM, PARTICLE MONITORING METHOD, AND MONITORING DEVICE (Tokyo Electron Limited) (20240229)
- 20240194459. PROCESSING METHOD AND PLASMA PROCESSING APPARATUS (Tokyo Electron Limited) (20240613)
A N M Wasekul AZAD of Santa Clara CA (US)
- Number of Plasma Technology patents: 4
- Top companies:
- Applied Materials, Inc.: 4 patents
- Recent patents:
- 20240290578. RADIO FREQUENCY DIVERTER ASSEMBLY ENABLING ON-DEMAND DIFFERENT SPATIAL OUTPUTS (Applied Materials, Inc.) (20240829)
- 20240079212. SCANNING IMPEDANCE MEASUREMENT IN A RADIO FREQUENCY PLASMA PROCESSING CHAMBER (Applied Materials, Inc.) (20240307)
- 20240177968. SYSTEM AND METHODS FOR IMPLEMENTING A MICRO PULSING SCHEME USING DUAL INDEPENDENT PULSERS (Applied Materials, Inc.) (20240530)
Atsushi TAKAHASHI
- Number of Plasma Technology patents: 4
- Top companies:
- Tokyo Electron Limited: 4 patents
- Recent patents:
- 20240112918. PLASMA PROCESSING SYSTEM, PLASMA PROCESSING APPARATUS, AND ETCHING METHOD (Tokyo Electron Limited) (20240404)
- 20240112922. ETCHING METHOD AND PLASMA PROCESSING SYSTEM (Tokyo Electron Limited) (20240404)
- 20240153744. ETCHING METHOD AND PLASMA PROCESSING APPARATUS (Tokyo Electron Limited) (20240509)
Kazuki MOYAMA
- Number of Plasma Technology patents: 4
- Top companies:
- Tokyo Electron Limited: 4 patents
- Recent patents:
Mitsunori Ohata
- Number of Plasma Technology patents: 4
- Top companies:
- Tokyo Electron Limited: 4 patents
- Recent patents:
Gen TAMAMUSHI
- Number of Plasma Technology patents: 4
- Top companies:
- Tokyo Electron Limited: 4 patents
- Recent patents:
- 20240170258. PLASMA PROCESSING SYSTEM AND PLASMA PROCESSING METHOD (Tokyo Electron Limited) (20240523)
- 20240222078. PLASMA PROCESSING APPARATUS, POWER SUPPLY SYSTEM, CONTROL METHOD, PROGRAM, AND STORAGE MEDIUM (Tokyo Electron Limited) (20240704)
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Hiroyuki MATSUURA
- Number of Plasma Technology patents: 4
- Top companies:
- Tokyo Electron Limited: 4 patents
- Recent patents:
Satoru KAWAKAMI
- Number of Plasma Technology patents: 4
- Top companies:
- TOKYO ELECTRON LIMITED: 2 patents
- Tokyo Electron Limited: 2 patents
- Recent patents:
Shota YOSHIMURA
- Number of Plasma Technology patents: 4
- Top companies:
- Tokyo Electron Limited: 4 patents
- Recent patents:
- 20240212987. GAS SUPPLY SYSTEM, GAS CONTROL SYSTEM, PLASMA PROCESSING APPARATUS, AND GAS CONTROL METHOD (Tokyo Electron Limited) (20240627)
- 20240071727. SUBSTRATE PROCESSING METHOD AND PLASMA PROCESSING APPARATUS (Tokyo Electron Limited) (20240229)
- 20240071728. SUBSTRATE PROCESSING METHOD AND PLASMA PROCESSING APPARATUS (Tokyo Electron Limited) (20240229)
Jianping Zhao of Austin TX (US)
- Number of Plasma Technology patents: 4
- Top companies:
- Tokyo Electron Limited: 4 patents
- Recent patents:
Qiang Wang of Austin TX (US)
- Number of Plasma Technology patents: 4
- Top companies:
- Tokyo Electron Limited: 4 patents
- Recent patents:
Shin YAMAGUCHI
- Number of Plasma Technology patents: 4
- Top companies:
- Tokyo Electron Limited: 4 patents
- Recent patents:
Makoto KATO
- Number of Plasma Technology patents: 4
- Top companies:
- Tokyo Electron Limited: 4 patents
- Recent patents:
- 20240194514. SUBSTRATE SUPPORT AND SUBSTRATE PROCESSING APPARATUS (Tokyo Electron Limited) (20240613)
- 20240087857. PLASMA PROCESSING APPARATUS AND SUBSTRATE SUPPORT (Tokyo Electron Limited) (20240314)
- 20240047182. PLASMA PROCESSING APPARATUS AND ELECTROSTATIC CHUCK (Tokyo Electron Limited) (20240208)
Hajime TAMURA
- Number of Plasma Technology patents: 4
- Top companies:
- Tokyo Electron Limited: 4 patents
- Recent patents:
Kazuya NAGASEKI
- Number of Plasma Technology patents: 4
- Top companies:
- Tokyo Electron Limited: 4 patents
- Recent patents:
- 20240096608. PLASMA MONITORING SYSTEM, PLASMA MONITORING METHOD, AND MONITORING DEVICE (Tokyo Electron Limited) (20240321)
- 20240068921. PARTICLE MONITORING SYSTEM, PARTICLE MONITORING METHOD, AND MONITORING DEVICE (Tokyo Electron Limited) (20240229)
- 20240194459. PROCESSING METHOD AND PLASMA PROCESSING APPARATUS (Tokyo Electron Limited) (20240613)
Satoru TERUUCHI
- Number of Plasma Technology patents: 4
- Top companies:
- Tokyo Electron Limited: 4 patents
- Recent patents:
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- 20240068921. PARTICLE MONITORING SYSTEM, PARTICLE MONITORING METHOD, AND MONITORING DEVICE (Tokyo Electron Limited) (20240229)
- 20240194459. PROCESSING METHOD AND PLASMA PROCESSING APPARATUS (Tokyo Electron Limited) (20240613)
Yasuharu SASAKI
- Number of Plasma Technology patents: 4
- Top companies:
- Tokyo Electron Limited: 4 patents
- Recent patents:
Naoki MATSUMOTO
- Number of Plasma Technology patents: 4
- Top companies:
- Tokyo Electron Limited: 4 patents
- Recent patents:
Da Song of Albany NY (US)
- Number of Plasma Technology patents: 3
- Top companies:
- Tokyo Electron Limited: 3 patents
- Recent patents:
Shin MATSUURA
- Number of Plasma Technology patents: 3
- Top companies:
- Tokyo Electron Limited: 2 patents
- TOKYO ELECTRON LIMITED: 1 patents
- Recent patents:
Chelsea DuBose of Austin TX (US)
- Number of Plasma Technology patents: 3
- Top companies:
- Tokyo Electron Limited: 3 patents
- Recent patents:
Justin Moses of Austin TX (US)
- Number of Plasma Technology patents: 3
- Top companies:
- Tokyo Electron Limited: 3 patents
- Recent patents:
Hiroyuki MIYASHITA
- Number of Plasma Technology patents: 3
- Top companies:
- Tokyo Electron Limited: 3 patents
- Recent patents:
Top Collaborations in Plasma Technology
Top US States for Plasma Technology Inventors
Top Cities for Plasma Technology Inventors
- Miyagi: 181 inventors
- Tokyo: 121 inventors
- Kurokawa-gun: 72 inventors
- Suwon-si: 64 inventors
- Austin: 51 inventors
- Yamanashi: 44 inventors
- Fremont: 41 inventors
- Albany: 40 inventors
- Santa Clara: 40 inventors
- San Jose: 40 inventors
- Seoul: 20 inventors
- Nirasaki City: 18 inventors
- Hsinchu: 16 inventors
- Sunnyvale: 14 inventors
- Pleasanton: 13 inventors
- Portland: 13 inventors
- Redwood City: 12 inventors
- Nirasaki City, Yamanashi: 11 inventors
- Shanghai: 11 inventors
- Saratoga: 10 inventors
