20250167040. Lifting Mechanism S (Tokyo Electron Limited)
LIFTING MECHANISM AND SUBSTRATE PROCESSING APPARATUS
Abstract: a lifting mechanism for raising or lowering a substrate holder configured to hold a plurality of substrates in a shelf-like manner, includes a support configured to support the substrate holder, and a multi-joint arm having a tip connected to the support to raise or lower the support.
Inventor(s): Manabu HONMA
CPC Classification: H01L21/68792 (using mechanical means, e.g. chucks, clamps or pinches {(using elecrostatic chucks )})
Search for rejections for patent application number 20250167040