LIFTING MECHANISM AND SUBSTRATE PROCESSING APPARATUS

Abstract: a lifting mechanism for raising or lowering a substrate holder configured to hold a plurality of substrates in a shelf-like manner, includes a support configured to support the substrate holder, and a multi-joint arm having a tip connected to the support to raise or lower the support.

Inventor(s): Manabu HONMA

CPC Classification: H01L21/68792 (using mechanical means, e.g. chucks, clamps or pinches {(using elecrostatic chucks )})

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