18819033. INTEGRATED PRESSURE DIAPHRAGMS (EDWARDS LIFESCIENCES CORPORATION)

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INTEGRATED PRESSURE DIAPHRAGMS

Organization Name

EDWARDS LIFESCIENCES CORPORATION

Inventor(s)

Alexander H. Siemons of Yorba Linda CA (US)

Gustavo Rios of Pasadena CA (US)

INTEGRATED PRESSURE DIAPHRAGMS

This abstract first appeared for US patent application 18819033 titled 'INTEGRATED PRESSURE DIAPHRAGMS



Original Abstract Submitted

A method of manufacturing an integrated, flexible diaphragm for a pressure sensor using a physical vapor deposition process (PVD), including: providing a mandrel form, the mandrel form including a body portion and a diaphragm portion, placing the mandrel form in a vacuum deposition chamber, depositing a plurality of base layers of a material over at least a portion of the body portion of the mandrel form surrounding the diaphragm portion, and depositing a skin layer over the diaphragm portion and over the deposited plurality of base layers around the diaphragm portion to form the integrated, flexible diaphragm.

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