18819033. INTEGRATED PRESSURE DIAPHRAGMS (EDWARDS LIFESCIENCES CORPORATION)
INTEGRATED PRESSURE DIAPHRAGMS
Organization Name
EDWARDS LIFESCIENCES CORPORATION
Inventor(s)
Alexander H. Siemons of Yorba Linda CA (US)
Gustavo Rios of Pasadena CA (US)
INTEGRATED PRESSURE DIAPHRAGMS
This abstract first appeared for US patent application 18819033 titled 'INTEGRATED PRESSURE DIAPHRAGMS
Original Abstract Submitted
A method of manufacturing an integrated, flexible diaphragm for a pressure sensor using a physical vapor deposition process (PVD), including: providing a mandrel form, the mandrel form including a body portion and a diaphragm portion, placing the mandrel form in a vacuum deposition chamber, depositing a plurality of base layers of a material over at least a portion of the body portion of the mandrel form surrounding the diaphragm portion, and depositing a skin layer over the diaphragm portion and over the deposited plurality of base layers around the diaphragm portion to form the integrated, flexible diaphragm.
