View source for Taiwan semiconductor manufacturing company, ltd. (20250006777). THIN FILM RESISTOR

=THIN FILM RESISTOR=


==Organization Name==

[[:Category:taiwan semiconductor manufacturing company, ltd.|taiwan semiconductor manufacturing company, ltd.]]


[[Category:taiwan semiconductor manufacturing company, ltd.]]

==Inventor(s)==

[[:Category:Chun-Heng Chen of Hsinchu City (TW)|Chun-Heng Chen of Hsinchu City (TW)]][[Category:Chun-Heng Chen of Hsinchu City (TW)]]

[[:Category:Chi-Yuan Shih of Hsinchu (TW)|Chi-Yuan Shih of Hsinchu (TW)]][[Category:Chi-Yuan Shih of Hsinchu (TW)]]

[[:Category:Hsin-Li Cheng of Hsinchu (TW)|Hsin-Li Cheng of Hsinchu (TW)]][[Category:Hsin-Li Cheng of Hsinchu (TW)]]

[[:Category:Shih-Fen Huang of Zhubei (TW)|Shih-Fen Huang of Zhubei (TW)]][[Category:Shih-Fen Huang of Zhubei (TW)]]

[[:Category:Tuo-Hsin Chien of Hsinchu County (TW)|Tuo-Hsin Chien of Hsinchu County (TW)]][[Category:Tuo-Hsin Chien of Hsinchu County (TW)]]

[[:Category:Yu-Chi Chang of Kaohsiung (TW)|Yu-Chi Chang of Kaohsiung (TW)]][[Category:Yu-Chi Chang of Kaohsiung (TW)]]

==THIN FILM RESISTOR==


This abstract first appeared for US patent application 20250006777 titled 'THIN FILM RESISTOR




==Original Abstract Submitted==

resistors and method of forming the same are provided. a device structure according to the present disclosure includes a substrate, a first intermetal dielectric (imd) layer over the substrate, a resistor that includes a first resistor layer over the first imd layer, a second resistor layer over the first resistor layer, and a third resistor layer over the second resistor layer, a second imd layer over the first imd layer and the resistor, a first contact via extending through the second imd layer and the third resistor layer and terminating in the first resistor layer, and a second contact via extending through the second imd layer and the third resistor layer and terminating in the first resistor layer.



[[Category:H01C17/075]]
[[Category:H01C7/00]]
[[Category:H01L23/522]]
[[Category:CPC_H01L28/24]]