Taiwan semiconductor manufacturing company, ltd. (20250006777). THIN FILM RESISTOR
THIN FILM RESISTOR
Organization Name
taiwan semiconductor manufacturing company, ltd.
Inventor(s)
Chun-Heng Chen of Hsinchu City TW
Tuo-Hsin Chien of Hsinchu County TW
THIN FILM RESISTOR
This abstract first appeared for US patent application 20250006777 titled 'THIN FILM RESISTOR
Original Abstract Submitted
resistors and method of forming the same are provided. a device structure according to the present disclosure includes a substrate, a first intermetal dielectric (imd) layer over the substrate, a resistor that includes a first resistor layer over the first imd layer, a second resistor layer over the first resistor layer, and a third resistor layer over the second resistor layer, a second imd layer over the first imd layer and the resistor, a first contact via extending through the second imd layer and the third resistor layer and terminating in the first resistor layer, and a second contact via extending through the second imd layer and the third resistor layer and terminating in the first resistor layer.