View source for Applied materials, inc. (20240408621). SHOWERHEAD HEATED BY CIRCULAR ARRAY

=SHOWERHEAD HEATED BY CIRCULAR ARRAY=


==Organization Name==

[[:Category:applied materials, inc.|applied materials, inc.]]


[[Category:applied materials, inc.]]

==Inventor(s)==

[[:Category:Shashidhara Patel H B of Bangalore (IN)|Shashidhara Patel H B of Bangalore (IN)]][[Category:Shashidhara Patel H B of Bangalore (IN)]]

[[:Category:Muhannad Mustafa of Milpitas CA (US)|Muhannad Mustafa of Milpitas CA (US)]][[Category:Muhannad Mustafa of Milpitas CA (US)]]

[[:Category:Amit Sahu of Bangalore (IN)|Amit Sahu of Bangalore (IN)]][[Category:Amit Sahu of Bangalore (IN)]]

[[:Category:Sanjeev Baluja of Campbell CA (US)|Sanjeev Baluja of Campbell CA (US)]][[Category:Sanjeev Baluja of Campbell CA (US)]]

==SHOWERHEAD HEATED BY CIRCULAR ARRAY==


This abstract first appeared for US patent application 20240408621 titled 'SHOWERHEAD HEATED BY CIRCULAR ARRAY




==Original Abstract Submitted==

process chamber lids, processing chambers and methods using the lids are described. in some embodiments, the lid includes a showerhead with a plurality of heater segments in a peripheral region thereof. the heated showerhead minimizes temperature non-uniformity and/or minimizes heat less near the peripheral edge of a processed wafer.



[[Category:B05B1/00]]
[[Category:B05B1/24]]
[[Category:H01L21/02]]
[[Category:CPC_B05B1/005]]