Applied materials, inc. (20240408621). SHOWERHEAD HEATED BY CIRCULAR ARRAY
SHOWERHEAD HEATED BY CIRCULAR ARRAY
Organization Name
Inventor(s)
Shashidhara Patel H B of Bangalore (IN)
Muhannad Mustafa of Milpitas CA (US)
Sanjeev Baluja of Campbell CA (US)
SHOWERHEAD HEATED BY CIRCULAR ARRAY
This abstract first appeared for US patent application 20240408621 titled 'SHOWERHEAD HEATED BY CIRCULAR ARRAY
Original Abstract Submitted
process chamber lids, processing chambers and methods using the lids are described. in some embodiments, the lid includes a showerhead with a plurality of heater segments in a peripheral region thereof. the heated showerhead minimizes temperature non-uniformity and/or minimizes heat less near the peripheral edge of a processed wafer.